Solid state water vapor sensor for robotics applications

Abstract

is o b s e r v e d a t water v a p o r c o n c e n t r a t i o n s h i g h e r t h a n 40% RH. Gold Electrode Silver Paint ccontact Fig.lA A top view of the glass humidity %ensor surface Glass sensor surface Fig 16 A cross-section structure of the glass humidity sensor l o -' : Humid Air 9 R humidity Humld Air [ 4 S humidity) 10 -* VOLTAGE( Vol t ) Fig.2 Current-Voltage characteristics of the gloss sensor in several atmospheres. l o " % 0 00