In this work, we investigated the effect of surface treatment of the Cu2ZnSnS4 (CZTS) thin films using ammonia solution. CZTS thin films were prepared by RF sputtering using single CZTS target with sulfurization process. In order to study the effect of surface treatment using ammonia solution, solution temperature was varied. Structural properties of the samples are almost same with and without ammonia surface treatment measured by XRD and Raman spectroscopy. From the measurement of the chemical composition, the Zn is dissolved by ammonia solution. In addition, the removal rate of oxygen and sodium is different between deionised water and ammonia solution. Ammonia could have prevented their removal from the surface to solution. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)