A technique for determination of the thickness of a planeparallel transparent plate using a lateral shearing interferometer ͑LSI͒ is discussed. With this technique, the parallel plate whose thickness is to be determined is used to introduce a change in the collimation of the retro-reflected beam from an optical setup in which a corrected lens focuses an expanded collimated laser beam on the surface of a plane mirror placed at the back focal plane of the lens. The thickness of the plate is calculated by measuring the defocusing caused by the plate, which is inserted in the beam path between the collimating lens and the plane mirror, with an LSI. Results obtained for a parallel plate are presented.
IntroductionAmong different collimation testing techniques, 1 the Lateral Shearing Interferometer ͑LSI͒ is widely used for testing the collimation of a laser beam. The LSI also has many useful applications in optical testing.Theory, different configurations, and applications of the LSI are available in the literature. 2-15 A transparent, parallel, or slightly wedged plate held obliquely to an incident beam works as an LSI. A wedged-plate LSI is more sensitive compared to a plane-parallel plate shearing interferometer because the shear fringes tend to align parallel to the shear direction with the increase in degree of collimation of the beam. A slight defocusing in the test beam results in the inclination of the shear fringes with respect to the shear direction. Techniques showing higher sensitivity in the testing of collimation have been reported. [4][5][6][7][8][9][10] Noncontact thickness measurement of transparent plates has been reported by researchers. 16,17 Their techniques require not only a sensitive detector but also a very high precision translation stage. Techniques related to surface profiling of transparent objects are available in literature. 18 In the present paper, we describe a noncontact technique for determining the thickness of a thin, plane-parallel, transparent plate using an LSI. In our technique, no translation of the optics is required during the measurement.