Space–Time Coupled Finite Element Simulation of PECVD Reactor

Abstract

In this paper, space-time distribution of nanoparticles, as predicted by the fluid model, is simulated using Galerkin based space-time coupled finite element methodology. The method is utilized to simulate the silane discharge process and the ensuing behavior of the affected particles as a function of time in a plasma enhanced chemical vapor deposition (PECVD) reactor. PECVD is a practical technique of producing thin silicon films. Simulation of this process, as modeled by a set of nonlinear partial differential equations, requires extensive resolution in time. An attempt at establishing a stable and convergent computational process was successful only when space-time coupled finite element methodology was utilized to simulate this problem. Details of the methodology along with results of a particular test case are presented.

Galerkin Finite-Element Method for the Analysis of the Second Harmonic Generation in Wagon Wheel Fibers

“…The method devised, here, was coded into the SyNA computational tool [20] developed at Kerman Graduate University of Technology. In order to check the validity of the method devised and the computer code developed, the numerical solution for SHG in a typical rectangular waveguide was calculated analytically as well.…”

Design and Simulation of a Highly Sensitive SPR Optical Fiber Sensor

“…Final note should be added that the method used in this work is based on full vectorial finite element. This boundary value problem is solved by a home-written numerical algorithm called SyNA, which is also applicable in other fields [17,18]. The software is checked by comparing the results with other commercially available independent software.…”

“…The proposed system is analyzed and improved upon through simulation by making use of the finite element method available from SyNA software [17,18]. The SyNA software [17,18] is a home-written software introduced in [17,18].…”

“…The proposed system is analyzed and improved upon through simulation by making use of the finite element method available from SyNA software [17,18]. The SyNA software [17,18] is a home-written software introduced in [17,18]. The parameters that are varied to improve the design are gold layer's thickness and/or the thickness of the core struts while best values based on the aforementioned criteria are selected.…”