SPACES: A PC implementation of the stochastic theory of energy loss for narrow-resonance depth profiling

Compositional stability of hafnium aluminates thin films deposited on Si by atomic layer deposition

“…The solid line in the excitation curve of Fig. 2͑b͒ ͑HfO 2 ͒ represents a simulation performed assuming a constant 18 O concentration profile, whereas the dashed line represents a simulation performed assuming the profile shown in the inset.…”

“…Excitation curves and the corresponding simulated concentration profiles ͑insets͒ are shown in Figs. 2͑a͒-2͑d͒ for the homogeneous, mixed oxides of 18 O profiles extracted from the simulation of the experimental curves are shown in the insets. The solid line in the excitation curve of Fig.…”

“…18,19 Typical precision in 18 O amounts is 5%. Elemental amounts for samples annealed at 1000°C in 0.1 and 1 mbar in 18 O 2 are plotted in the inset of Fig. 1͑b͒.The data points in the inset of Fig.…”

“…We performed rapid thermal annealing of the selected samples of Table I in the low pressures of 18 O 2 range mentioned above, at 600°C for 60 s and at 1000°C for 10 s. 18 O areal densities were determined using the 18 O͑p , ␣͒ 15 N nuclear reaction in a plateau region of the cross section curve near 730 keV. 18,19 Typical precision in 18 O amounts is 5%.…”

“…Since we found that increasing Al content is related to increasing O deficiency, we propose that metal losses during RTA is also a mechanism of eliminating O-deficient sites remaining from film deposition. Narrow resonance nuclear reaction profiling ͑NRP͒ 18,19 was also employed to determine 18 O profiles using the narrow ͑⌫ = 100 eV͒ resonance at 151 keV in the cross section curve of the 18 O͑p , ␣͒ 15 N reaction, with an approximate depth resolution of 0.7 nm in near-surface regions. Excitation curves and the corresponding simulated concentration profiles ͑insets͒ are shown in Figs.…”