Spatial and temporal variations of electron temperatures and densities from EUV-emitting lithium plasmas

Coons, R. W.; Harilal, S. S.; Polek, M.; Hassanein, A.

doi:10.1007/s00216-011-4792-y

Cited by 17 publications

(9 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Different authors [17][18][19][20][21][22][23][24][25][26][27][28][29][30] have previously described this kind of study. In order to study the plasma-plume expansion dynamics of different species, we plotted spectrally resolved 1D-spatial and 1D-spectral imaging mode for different delay times.…”

Section: Oes Analysismentioning

confidence: 99%

Imaging spectroscopy of Ag plasmas produced by infrared nanosecond laser ablation

Camacho

Oujja

Sanz

et al. 2019

J. Anal. At. Spectrom.

View full text Add to dashboard Cite

show abstract

Section: Oes Analysismentioning

confidence: 99%

Imaging spectroscopy of Ag plasmas produced by infrared nanosecond laser ablation

Camacho

Oujja

Sanz

et al. 2019

J. Anal. At. Spectrom.

View full text Add to dashboard Cite

show abstract

“…The impact parameter is a function of the electron temperature, but the dependence is negligibly weak [66,71]. Fig.…”

mentioning

confidence: 99%

Time- and space-resolved spectroscopic characterization of laser-induced swine muscle tissue plasma

Camacho

Díaz

Martínez-Ramírez

et al. 2015

Spectrochimica Acta Part B: Atomic Spectroscopy

View full text Add to dashboard Cite

The spatial-temporal evolution of muscle tissue sample plasma induced by a high-power transversely excited atmospheric (TEA) CO 2 pulsed laser at vacuum conditions (0.1-0.01 Pa) has been investigated using high-resolution optical emission spectroscopy (OES) and imaging methods.The induced plasma shows mainly electronically excited neutral Na, K, C, Mg, H, Ca, N and O Plasma parameters such as electron density and temperature were measured from the spatiotemporal analysis of different species. Average velocities of some plasma species were estimated.

show abstract

“…The plasma density can be inferred from the profile of the line spectra, because the shape and width of the spectral lines are governed by the collisional process perturbing the emitting atoms and ions. The FWHM of Stark broadened lines is related to the electron number density n e by [21][22][23] Dk 1=2 ¼ 2W p n e 10 16 1 þ 1:75G n e 10 16 1=4…”

Section: Resultsmentioning

confidence: 99%

“…15 They also studied the spatial and temporal variations of electron temperatures and densities from EUVemitting lithium plasmas with the Nd:YAG laser. 16 Namba et al studied the vacuum ultraviolet out-of-band radiation emitted from dense spherical minimum-mass tin plasmas generated by a Nd:YAG laser. 17 Recently, Shaikh et al investigated the temporal and spatial evolution of the electron temperature and electron density of Sn plasma produced by a CO 2 laser with a pulse energy of 130 mJ for delay times between 200 ns and 1100 ns using a one-dimensional OES method.…”

Section: Introductionmentioning

confidence: 99%

Time and space resolved visible spectroscopic imaging CO2 laser produced extreme ultraviolet emitting tin plasmas

Wang

et al. 2012

Journal of Applied Physics

View full text Add to dashboard Cite

Experiments involving laser produced tin plasma have been carried out using a CO 2 laser with an energy of 800 mJ/pulse and a full width at half maximum (FWHM) of 80 ns in vacuum. Time-integrated extreme ultraviolet spectral measurement showed that the peak of the extreme ultraviolet lithography spectrum was located at 13.5 nm and the spectrum profile's FWHM of the unresolved transition arrays was 1.1 nm. Plasma parameters of the electron temperature and density measurements in both axial and radial directions at later times had been obtained from a two-dimensional time and space resolved image spectra analysis. The axial spatial distribution of the electron density showed a 1/d 2.6 decrease profile, and the radial spatial distribution of the electron density showed a 1/r 1.1 profile, in which d is the axial distance from the target surface and r is the radial distance. The electron density was found to maintain symmetry across the radial distance at all delay times. Near the plasma plume center, the electron temperature T e varied slightly with increasing axial or radial distance, which was related to collisional decoupling and reheating of the ionized species in the plasma at distances longer than 3 to 4 mm. The space averaged electron temperature was measured in the range of 3.4-1.0 eV, and the space averaged electron density was measured in the range of 2.0 Â 10 17 to 2.2 Â 10 16 cm À3 , as the time delay varied from 1.6 ls to 3.6 ls with respect to the pulse discharge. Time evolutions of the plasma temperature and density were found to have an apparent rise at a delay time of 2.4 ls in the corresponding time of the laser pulse tail peak. This suggests that plasma parameters and extreme ultraviolet emission intensity can be controlled by a double pulse combined laser.

show abstract

Spatial and temporal variations of electron temperatures and densities from EUV-emitting lithium plasmas

Cited by 17 publications

References 18 publications

Imaging spectroscopy of Ag plasmas produced by infrared nanosecond laser ablation

Imaging spectroscopy of Ag plasmas produced by infrared nanosecond laser ablation

Time- and space-resolved spectroscopic characterization of laser-induced swine muscle tissue plasma

Time and space resolved visible spectroscopic imaging CO2 laser produced extreme ultraviolet emitting tin plasmas

Contact Info

Product

Resources

About