A low power microwave-excited plasma atomic emission source has been developed which overcomes difficulties encountered with previous systems In the effective Introduction of samples Into the plasma. To solve these difficulties, a novel mlcroarc sample atomizer has been designed. This high voltage, low current, pulsating dc discharge efficiently vaporizes pre-drled, discrete volumes of sample solution Into the plasma where their atomic emission can be efficiently excited. The combined source (microwave plasma and mlcroarc sample atomizer) Is shown to possess many desirable features, including sensitivity (plcograms for many elements), precision (±5%), stability, low background, and minimal Interference effects. Axial viewing of the plasma and electronic volume measurement of samples are used to Increase precision In the overall determination. Computer control of the Instrument adds versatility and convenience of operation to the system and enables the collection and storage of larger amounts of data than manual operation.