This chapter discusses some of the most important imaging methods with low-energy electrons, including: low-energy electron microscopy (LEEM), its extension to spin-polarized low-energy electron microscopy (SPLEEM), and its combination with spectroscopic photoemission and low-energy electron microscopy (SPELEEM). Other imaging methods mentioned only briefly in the chapter include ultraviolet photoemission electron microscopy (UVPEEM), mirror electron microscopy (MEM), low-electron energy loss microscopy (LEELM), and Auger electron emission microscopy (AEEM). The instruments used in these imaging methods allow imaging not only in real space but also in reciprocal space, such as low-energy electron diffraction (LEED) and angle-resolved photoelectron spectroscopy (ARPES in SPELEEM). The combination of these methods with complementary high-lateral-resolution methods renders imaging with low-energy electrons a comprehensive surface analysis tool.
9.1Electron Beam-Specimen Interactions.