2009
DOI: 10.1007/s11051-009-9662-6
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Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives

Abstract: This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale. These techniques include spectroscopic ellipsometry, polarimetry, and reflectance anisotropy. We give an overview of the various ellipsometry strategies for the measurement and analysis of nanometric films, metal nanoparticles and nanowires, semiconductor nanocrystals, and submicron p… Show more

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Cited by 189 publications
(130 citation statements)
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“…The quasistatic approximation hence holds and the cluster layer can be correctly regarded as a continuous medium with an effective anisotropic dielectric function ε L,j . 11 The additivity of bulk and NP response, as well as the relationship between Re[ ε j ] and ε L,j , can be explained under the hypothesis of a thin anisotropic NP layer, bulk isotropy, and alignment of the optical and crystallographic axes. Previous 085440-3 work defining a surface excess function [26][27][28] is adapted to make the anisotropic response explicit.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…The quasistatic approximation hence holds and the cluster layer can be correctly regarded as a continuous medium with an effective anisotropic dielectric function ε L,j . 11 The additivity of bulk and NP response, as well as the relationship between Re[ ε j ] and ε L,j , can be explained under the hypothesis of a thin anisotropic NP layer, bulk isotropy, and alignment of the optical and crystallographic axes. Previous 085440-3 work defining a surface excess function [26][27][28] is adapted to make the anisotropic response explicit.…”
Section: Discussionmentioning
confidence: 99%
“…Spectroscopic ellipsometry (SE) can overcome this limitation as it monitors changes in the polarization state of a linearly polarized beam reflected at oblique angles of incidence. 10,11 It is therefore a tool capable of investigating the full optical behavior of a plasmonic sample in the far field. 12 Furthermore, SE can record the spectra with a better sensitivity than absorption spectroscopy, as only relative changes in the polarization state of the incoming light are measured.…”
Section: Introductionmentioning
confidence: 99%
“…Obviously, the optical properties of gold nanoparticles differ from bulk gold and this difference has to be taken into account. An appropriate and widely used solution is to treat the optical response of the particles as combination of oscillator models: typically one Drude-and three Lorentz-oscillators are used [25,26,27]. The third layer in the stack is similar to the first but not the same: the non-uniformity and the polydispersity of the particulate system result here a bit higher effective layer thickness and void ratio.…”
Section: Properties Of Langmuir-and Langmuir-blodgett Filmsmentioning
confidence: 99%
“…For much more extended and detailed up-to-date discussion on fundamental principles of ellipsometry, instrumentations, data analysis as well as multiple applications, see (Tompkins, 1993;Tompkins & McGahan, 1999;Tompkins & Irene (Eds. ), 2005;Fujiwara, 2007;Losurdo et al, 2009;Azzam, 2010). Ellipsometry (reflection polarimetry; single-wavelength as well as spectroscopic) is an optical measurement technique for evaluation geometrical and material properties of substrates, thin films and multilayer structures.…”
Section: Fundamentals Of Ellipsometrymentioning
confidence: 99%