Spherical mirror testing by phase retrieval wavefront sensor

Self Cite

In this paper, we demonstrate the use of the modified phase retrieval as a method for application in the measurement of small-slope free-form optical surfaces. This technique is a solution for the measurement of small-slope free-form optical surfaces, based on the modified phase retrieval algorithm, whose essence is that only two defocused images are needed to estimate the wave front with an accuracy similar to that of the traditional phase retrieval but with less image capturing and computation time. An experimental arrangement used to measure the small-slope free-form optical surfaces using the modified phase retrieval is described. The results of these experiments demonstrate that the modified phase retrieval method can achieve measurements comparable to those of the standard interferometer.

Section: The Principle Of Prmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Measurement of Small-Slope Free-Form Optical Surfaces with the Modified Phase Retrieval

Wang

et al. 2022

Self Cite

“…It has good application prospects in optical processing, system configuration, active optics, adaptive optics, and other fields, thus favored by experts. The main advantages of the PR measurement method are as follows (see Reference [ 18 ] for details): large dynamic range, high resolution, and high sensitivity. It can accurately calculate the surface of the mirror to be measured with small camera sampling points, which can achieve the equivalent accuracy of the interferometer.…”

Section: Introductionmentioning

confidence: 99%

Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

Ma,

Wang,

Wang

et al. 2023

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Complex optical elements have the advantages of improving image quality and optical performance and expanding the field of view. Therefore, it is widely used in X-ray scientific devices, adaptive optical elements, high-energy laser systems, and other fields and is a hot research direction in precision optics. Especially for precision machining, there is a greater need for high-precision testing technology. However, how to measure complex surfaces efficiently and accurately is still an important research topic in optical metrology technology. In order to verify the ability of optical metrology for complex optical surfaces with wavefront sensing based on image information of the focal plane, some experiment platforms in different types of optical surfaces were set up. In order to validate the feasibility and validity of wavefront-sensing technology based on image information of focal planes, a large number of repetitive experiments were carried out. The measurement results with wavefront sensing based on image information of the focal plane were compared with the measurement results with the ZYGO interferometer. The experimental results demonstrate that good agreement is obtained among the error distribution, PV value, and RMS value of the ZYGO interferometer, which shows the feasibility and validity of wavefront sensing based on image information of focal plane technology in optical metrology for the complex optical surface.

Measurement of the Aspherical Optical Surfaces with the Improved Phase Retrieval

Wang

et al. 2022

In order to verify the estimated wave-front ability of the phase retrieval, a method utilized in the measurement of the aspherical optical surfaces using the phase retrieval technology is described. This technique is based on the algorithm as a solution for the measurement of the aspherical optical surfaces, whose principle is sampling a number of the given defocus images and obtaining the phase information by solving the wave-front with Fourier optical diffractive theory and mathematics optimization. We set up an experimental arrangement used to measure the aspherical optical surfaces using the improved phase retrieval. In addition, we introduced the method of optical alignment in detail, which is very important for high-precision measurements. We obtained an agreement among the error distributions, the peak value, and the root-mean-square value of a ZYGO interferometer, which demonstrates that the improved phase retrieval method can effectively estimate the wave-front and the aberrations of aspherical optical surfaces.