1994
DOI: 10.1016/0921-5107(94)90250-x
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Spray pyrolysis deposition for indium oxide doped with different impurities

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Cited by 32 publications
(2 citation statements)
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“…[15][16][17][18][19][20] ITO films for applications in transparent electrodes for display devices, 21 transparent coatings for solar energy heat mirrors and window films in n-p heterojunction solar cells 17 have been manufactured by sputtering, 21,22 evaporation, 23 chemical vapor deposition, 24 sol-gel method, 25 dip-coating process, 26 and spray pyrolysis. 20,27 Ultrafine powders have been necessary in the production of highly dense targets as well as homogeneous slurries, etc. Among the powder processing techniques, coprecipitation has been suggested as a simple and economic way to obtain nanocrystalline ITO powders with controlled particle size and morphology.…”
Section: Introductionmentioning
confidence: 99%
“…[15][16][17][18][19][20] ITO films for applications in transparent electrodes for display devices, 21 transparent coatings for solar energy heat mirrors and window films in n-p heterojunction solar cells 17 have been manufactured by sputtering, 21,22 evaporation, 23 chemical vapor deposition, 24 sol-gel method, 25 dip-coating process, 26 and spray pyrolysis. 20,27 Ultrafine powders have been necessary in the production of highly dense targets as well as homogeneous slurries, etc. Among the powder processing techniques, coprecipitation has been suggested as a simple and economic way to obtain nanocrystalline ITO powders with controlled particle size and morphology.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] Small, uniform-sized droplets are needed for the preparation of ultrafine powders and thin film for integrated circuits with submicron features. For these applications, the droplet size should be around 1 m and large production rates are required.…”
Section: Introductionmentioning
confidence: 99%