Sputter deposited LiPON thin films from powder target as electrolyte for thin film battery applications

Nimisha, C.S.; Rao, K. Yellareswar; Venkatesh, G.; Rao, G. Mohan; Munichandraiah, N.

doi:10.1016/j.tsf.2011.01.087

Cited by 85 publications

(78 citation statements)

References 31 publications

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“…It has two peaks representing the 2p 1/2 and 2p 3/2 (0.8 eV lower than 2p 1/2 [17]) contributions to the phosphorus bonding in PN x O 4-x tetrahedron. Studies on XPS of LiPON showed a reduction in P2p binding energy of Li 3 PO 4 when P-O bonds are gradually replaced by P-N bonds, which change the charge distribution around phosphorus in thin films [18,19]. In Fig.…”

Section: Electrochemicalmentioning

confidence: 99%

Electrochemical properties and optical transmission of high Li⁺ conducting LiSiPON electrolyte films

Su¹,

Falgenhauer²,

Leichtweiß

et al. 2016

Physica Status Solidi (b)

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Lithium silicon phosphorus oxynitride (LiSiPON) thin films with different compositions have been prepared by RF magnetron sputtering in N2 by using three targets xLi2SiO3 · (1 − x) Li3PO4 with x = 0.1, 0.3, and 0.5. Compared with LiPON, the electrical properties of LiSiPON have been improved by introducing silicon. LiSiPON films deposited from the target 0.5Li2SiO3 · 0.5Li3PO4 yield the highest ionic conductivity of up to 9.7 × 10−6 S cm−1 with an activation energy of only 0.41 eV. The main mechanism for increasing ionic conductivity is the enhancement of carrier mobility. By DC polarization measurements the electronic partial conductivity was found at least seven orders of magnitude smaller than the ionic conductivity. Linear voltammetry results showed that the LiSiPON films are electrochemically stable in contact with stainless steel in the voltage range of 0–6 V. The substitution of silicon for phosphorus in the film evidenced from X‐ray photoelectron spectroscopy analysis indicated silicon in the film will create more abundant cross‐linking structures Si–O–P and (P, Si)–N < (P, Si), hence created more Li+ conducting paths which favored the higher mobility of lithium ions and larger ionic conductivity. The optical bandgap was found to decrease with increasing silicon content. We demonstrate that the prepared LiSiPON films with their larger ionic conductivity and low electronic conductivity may serve as an alternative to LiPON for applications in high energy density and high voltage lithium batteries.

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Section: Electrochemicalmentioning

confidence: 99%

Electrochemical properties and optical transmission of high Li⁺ conducting LiSiPON electrolyte films

Su¹,

Falgenhauer²,

Leichtweiß

et al. 2016

Physica Status Solidi (b)

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“…The powder compact target was presputtered for an hour to remove any hydrocarbons present. Based on our earlier studies [12], the deposition time of 40 minutes, rf power density of 3 Wcm − 2 , and N 2 flow of 30 sccm were optimized for best ionic conductivity in the deposited films. The substrate temperature was not controlled during deposition, but rises to 110°C towards the end of deposition due to plasma heating.…”

Section: Contents Lists Available At Sciencedirectmentioning

confidence: 99%

“…Our efforts for depositing RF sputtered LiPON thin films from an Li 3 PO 4 powder target in nitrogen plasma with high deposition rate (typically 30 nm/min) have been successfully accomplished with a good ionic conductivity of 1.1 × 10 − 6 S cm − 1 [12] for the deposited films. During this study, it was noted that there are some typical conditions and requirements for deposition and handling of LiPON thin films or devices based on them.…”

Section: Introductionmentioning

confidence: 99%

Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity

et al. 2011

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“…However, hot pressed or sintered ceramic targets may have a tendency to crack due to the localized thermal shock induced by the collisions of the energetic particles 180/ [684] G. J. Lee et al in high-density plasma [12][13][14]. In addition, a change in the chemical composition on the target surface during the entire fabrication process can cause the non-uniformity of TTFT performances.…”

Section: Introductionmentioning

confidence: 99%

Thermal Annealing Effects on the Characteristics of Transparent Semiconducting Zn₂SnO₄Thin Films Prepared by RF-Magnetron Sputtering with Powder Target

Lee¹,

Lee²,

Sohn³

2013

Molecular Crystals and Liquid Crystals

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Effects of thermal annealing on the structural, electrical and optical properties of transparent semiconducting Zn 2 SnO 4 (ZTO) thin films have been investigated. The ZTO thin film with the thickness of about 100 nm is prepared by the RF-magnetron sputtering technique using powder target. The experimental results show that the ZTO films annealed at above 400 • C possess inverse cubic spinel structure with a preferred grain orientation in the (311) direction. The transmittances of the ZTO films are approximately 80% in visible region regardless annealing temperature. The increasing annealing temperature leads to the increase in Hall mobility and electron concentration, resulting in the decrease of resistivity. The optical band gap of the films increases with the increase of annealing temperature.

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Sputter deposited LiPON thin films from powder target as electrolyte for thin film battery applications

Cited by 85 publications

References 31 publications

Electrochemical properties and optical transmission of high Li⁺ conducting LiSiPON electrolyte films

Electrochemical properties and optical transmission of high Li⁺ conducting LiSiPON electrolyte films

Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity

Thermal Annealing Effects on the Characteristics of Transparent Semiconducting Zn₂SnO₄Thin Films Prepared by RF-Magnetron Sputtering with Powder Target

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Sputter deposited LiPON thin films from powder target as electrolyte for thin film battery applications

Cited by 85 publications

References 31 publications

Electrochemical properties and optical transmission of high Li+ conducting LiSiPON electrolyte films

Electrochemical properties and optical transmission of high Li+ conducting LiSiPON electrolyte films

Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity

Thermal Annealing Effects on the Characteristics of Transparent Semiconducting Zn2SnO4Thin Films Prepared by RF-Magnetron Sputtering with Powder Target

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Product

Resources

About

Electrochemical properties and optical transmission of high Li⁺ conducting LiSiPON electrolyte films

Electrochemical properties and optical transmission of high Li⁺ conducting LiSiPON electrolyte films

Thermal Annealing Effects on the Characteristics of Transparent Semiconducting Zn₂SnO₄Thin Films Prepared by RF-Magnetron Sputtering with Powder Target