2013
DOI: 10.1080/15421406.2013.853552
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Thermal Annealing Effects on the Characteristics of Transparent Semiconducting Zn2SnO4Thin Films Prepared by RF-Magnetron Sputtering with Powder Target

Abstract: Effects of thermal annealing on the structural, electrical and optical properties of transparent semiconducting Zn 2 SnO 4 (ZTO) thin films have been investigated. The ZTO thin film with the thickness of about 100 nm is prepared by the RF-magnetron sputtering technique using powder target. The experimental results show that the ZTO films annealed at above 400 • C possess inverse cubic spinel structure with a preferred grain orientation in the (311) direction. The transmittances of the ZTO films are approximate… Show more

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Cited by 3 publications
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“…Figure a shows the X-ray diffraction (XRD) patterns of am-ZTO films formed by precursors at various concentrations (0.15, 0.30, 0.45, 0.75, and 1.05 M). Like the previous reports, a very small and broad peak at 34° was detected at these concentrations. In films formed by precursors at 0.15 and 0.30 M, the peak was very faint. As the concentrations increased above 0.30 M, however, the peak at 34.2° became visible.…”
supporting
confidence: 82%
“…Figure a shows the X-ray diffraction (XRD) patterns of am-ZTO films formed by precursors at various concentrations (0.15, 0.30, 0.45, 0.75, and 1.05 M). Like the previous reports, a very small and broad peak at 34° was detected at these concentrations. In films formed by precursors at 0.15 and 0.30 M, the peak was very faint. As the concentrations increased above 0.30 M, however, the peak at 34.2° became visible.…”
supporting
confidence: 82%