2021
DOI: 10.1016/j.apsusc.2021.151204
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Sputter yields of rough surfaces: Importance of the mean surface inclination angle from nano- to microscopic rough regimes

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Cited by 43 publications
(27 citation statements)
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References 49 publications
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“…The OKSANA (Shulga 2018) code addresses the same limitations of TRIM as SDTrimSP does. Cupak et al (2021) found that the governing parameter for description of the sputtering behavior is the mean value of the distribution of surface inclination angles, rather than the commonly used root mean square roughness. This finding is the basis for an analytical treatment of the effect of surface roughness on the sputter yield (Szabo et al 2022).…”
Section: The Total Sputter Yieldmentioning
confidence: 99%
“…The OKSANA (Shulga 2018) code addresses the same limitations of TRIM as SDTrimSP does. Cupak et al (2021) found that the governing parameter for description of the sputtering behavior is the mean value of the distribution of surface inclination angles, rather than the commonly used root mean square roughness. This finding is the basis for an analytical treatment of the effect of surface roughness on the sputter yield (Szabo et al 2022).…”
Section: The Total Sputter Yieldmentioning
confidence: 99%
“…In total, the sample received a fluence of 7.4 ×10 19 Ar•m -2 at 1000 eV and 1.1 ×10 20 Ar•m -2 at 2000 eV. This low-fluence approach proved to be very robust for measuring static sputtering yields of W samples 42 . With information from both the mass loss and the ion flux, incidence-angle-dependent sputtering yields were calculated.…”
Section: B Quartz Crystal Microbalance Experimentsmentioning
confidence: 99%
“…Numerical simulations based on the binary collision approximation were performed by means of the ray-tracing code SPRAY 42 . SPRAY uses a repository data set containing sputtering yields, ion reflection coefficients and secondary particle trajectories (i.e., for sputtered target atoms and reflected ions) for a given ion-target combination.…”
Section: Spray Simulationsmentioning
confidence: 99%
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