2020
DOI: 10.1016/j.jnucmat.2020.152019
|View full text |Cite
|
Sign up to set email alerts
|

Sputtering of nanostructured tungsten and comparison to modelling with TRI3DYN

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

1
13
0

Year Published

2020
2020
2023
2023

Publication Types

Select...
9

Relationship

2
7

Authors

Journals

citations
Cited by 26 publications
(14 citation statements)
references
References 24 publications
1
13
0
Order By: Relevance
“…Other prominent examples are numeric codes like TRI3DYN or SDTrimSP-3D, which employ the binary collision approximation (BCA) 49,50 . These codes have been successfully applied in studies focusing on sputtering-induced morphology effects and achieved results consistent with experimental data [51][52][53][54][55] . While these codes already allow to simulate topographies extending beyond 100 nm lateral size, consideration of larger surface inputs is still limited by computational resources.…”
Section: Introductionsupporting
confidence: 52%
“…Other prominent examples are numeric codes like TRI3DYN or SDTrimSP-3D, which employ the binary collision approximation (BCA) 49,50 . These codes have been successfully applied in studies focusing on sputtering-induced morphology effects and achieved results consistent with experimental data [51][52][53][54][55] . While these codes already allow to simulate topographies extending beyond 100 nm lateral size, consideration of larger surface inputs is still limited by computational resources.…”
Section: Introductionsupporting
confidence: 52%
“…By moving the catching QCM (catcher) in a circular arc around the sample, additionally the angular distribution of the ejected material can be probed. This method has already shown its capabilities in different experiments with metal samples (Berger et al 2017;Stadlmayr et al 2020b;Cupak et al 2021). In these cases, the irradiated samples and the coating on the catcher were exactly the same material.…”
Section: Methodsmentioning
confidence: 98%
“…According to this technique, the composition's dynamical change along a line perpendicular to the surface can be predicted, where sputtering, defect migrations, re-deposition of the recoiled atoms, and distribution of the implanted ions with other parameters are taken into account. 46 TRIM simulations are one of the most important techniques to understand the ion–solid interaction through the available SRIM package, which shows the relative outcome of the amorphous materials and the sputtering after the interaction. The main drawback of such TRIM simulations are that the simulations are performed under a static condition, so it is not possible to consider ion implantation, sputtering, and collision relocation of the atom during high-fluence modification.…”
Section: Methodsmentioning
confidence: 99%