1983
DOI: 10.1016/0039-6028(83)90800-2
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Sputtering of the gallium-indium eutectic alloy in the liquid phase

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Cited by 151 publications
(70 citation statements)
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“…1 This composite structure -bulk liquid metal supporting a thin rigid, superficial oxide -constitutes a semiconformal (i.e. conformal on length-scales exceeding 1 μm, but probably not conformal on the nanoscale) electrode.…”
Section: Introductionmentioning
confidence: 99%
“…1 This composite structure -bulk liquid metal supporting a thin rigid, superficial oxide -constitutes a semiconformal (i.e. conformal on length-scales exceeding 1 μm, but probably not conformal on the nanoscale) electrode.…”
Section: Introductionmentioning
confidence: 99%
“…To get out of this dilemma we go back to the method of data presentation used previously to quantify experimental data [2,3]. The authors quoted the fraction of sputtered atoms originating from the topmost layer, the remaining fraction being attributed to emission from deeper layers.…”
Section: Preferred Methods Of Data Presentationmentioning
confidence: 99%
“…For sputtering of Cu from Ru(0001) by normally incident 5 keV Ar, Burnett et al [2] reported that 66 ± 12% of the sputtered atoms originate from the 'first layer'. From an analysis of sputtering a liquid Ga-In eutectic alloy by Ar at normal incidence, Dumke et al [3] concluded that 85% of the sputtered atoms originated in the 'surface monolayer' at 15 keV, 70% at 25 keV. Given the uncertainties associated with insufficient knowledge of the surface binding energies, the agreement between experimental and calculated data may be considered reasonable.…”
Section: Preferred Methods Of Data Presentationmentioning
confidence: 99%
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“…Several groups [2-7,lO-141 have used the properties of surface segregation to overcome a relatively low-detection sensitivity in order to determine the second-layer contribution to the sputtering process. In one series of experiments [2,3], a fast segregant (In in Ga) was used to create a monolayer variant target which was unaffected by large primary ion doses. Catcher foils then were used to monitor the partial sputtering yield of each target component.…”
Section: Introductionmentioning
confidence: 99%