Sputterring and smoothing of metal surface with energetic gas cluster beams

Insepov, Z.; Yamada, Isao; Sosnowski, Marek

doi:10.1016/s0254-0584(98)00032-7

Cited by 41 publications

(19 citation statements)

References 11 publications

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“…This model was developed in our earlier papers [28,29] and is capable of completely removing the effect of shock waves and extending the simulation time for a single impact up to 20 ps (i.e., ten times longer than that of the conventional periodic boundary conditions, or PBCs).…”

Section: Sputtering Modelmentioning

confidence: 99%

“…The sputtering yield was calculated at different time instants from the beginning of the impact, and the calculation was continued until the yield became a constant, which was then used as a final yield value [29]. The longest MD run was calculated up to 20 ps of the MD time.…”

Section: Sputtering Modelmentioning

confidence: 99%

“…It is well-known that the PBCs create an unphysical reflection of elastic waves and the so-called Rahman's echo; indeed, both can drastically alter the calculated yield. Our thermal boundaries were developed specifically to be able to remove reflection of shock waves from the system boundaries in our previous papers [28,29]. These boundaries can efficiently remove elastic waves and thermal energy from the basic cell by coupling the MD atomistic system to a continuum elastic media described by elasticity and thermal diffusion equations.…”

Section: Sputtering Modelmentioning

confidence: 99%

See 2 more Smart Citations

Atomistic self-sputtering mechanisms of rf breakdown in high-gradient linacs

Insepov

Norem

Veitzer

2010

Nuclear Instruments and Methods in Physics Research Section B:

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Section: Sputtering Modelmentioning

confidence: 99%

Section: Sputtering Modelmentioning

confidence: 99%

Section: Sputtering Modelmentioning

confidence: 99%

See 1 more Smart Citation

Atomistic self-sputtering mechanisms of rf breakdown in high-gradient linacs

Insepov

Norem

Veitzer

2010

Nuclear Instruments and Methods in Physics Research Section B:

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“…1,39 By using MD simulations, we have obtained sputtering yields from Au and Cu surfaces due to Ar n (nϷ100-800) cluster bombardment at energies of 8-20 keV. 39 The sputtering yield Y of the material fits a power dependence Y ϳE 1.4 on the total cluster energy E or, if expressed by the energy per atom, on the cluster size n. Y varies from one material to the other as a function of material properties such as binding energy, sound velocity, etc. The correlation of these effects with Brinell hardness will be discussed in the next section.…”

Section: Sputtering Yieldmentioning

confidence: 99%

Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment

et al. 2000

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Large gas-cluster-ion bombardment has been shown to be a unique tool for generating a variety of bombarding effects over a broad range of acceleration energies. A hardness measurement technique is proposed in this paper based on the use of the effect of crater formation by large gas-cluster beams. The cluster impact leaves a hemispherical crater on a surface, the size of which varies with surface hardness and cluster parameters ͑which can be predetermined͒. As shown in this paper, the crater depth h ͑or diameter d͒ and Brinell hardness B are correlated through the formula hϳ(E/B) 1/3 , where E is the cluster acceleration energy. The material hardness, binding energy, and the crater size have also been correlated with the sputtering yield Y, and hence this correlation can also be experimentally applied for measuring hardness. The proposed method is based entirely on surface effects which depend only on the surface material and not on the substrate and therefore should be particularly suitable for measuring hardness of thin deposited films. This technique also eliminates the need for indentors that are harder than the material measured.

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“…A cluster ion is a polyatomic particle, and the impact of the cluster ion on a solid surface result in a non-linear irradiation effect [16][17][18][19]. The kinetic energy of a cluster ion can be converted to thermal energy by cluster ion irradiation [20,21].…”

Section: Introductionmentioning

confidence: 99%

Nanocluster Ions and Beam Techniques for Material Modification

Takaoka

2016

Trans. Mat. Res. Soc. Japan

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Various kinds of clusters such as hydrogen, ionic, and metallic bonding clusters were generated using several unique methods such as the nozzle beam, high-electric-field, and evaporation-on-liquid methods. The size and structure of these clusters were analyzed by time-of-flight (TOF), high-energy electron diffraction (HEED), transmission electron microscopy (TEM), and small-angle X-ray scattering (SAXS). In addition, the impact of the cluster ions on a solid surface was investigated, and unique irradiation effects were found, such as the low-energy irradiation effect and the high-density irradiation effect. The kinetic energy of the cluster ion was converted to thermal energy, resulting in extremely high temperatures. Furthermore, the simultaneous use of chemical sputtering and thermal annealing processes was demonstrated with ethanol cluster ion beams. As a result, low irradiation damage and high-rate sputtering of Si surfaces was performed by the retardation potential method.

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Sputterring and smoothing of metal surface with energetic gas cluster beams

Cited by 41 publications

References 11 publications

Atomistic self-sputtering mechanisms of rf breakdown in high-gradient linacs

Atomistic self-sputtering mechanisms of rf breakdown in high-gradient linacs

Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment

Nanocluster Ions and Beam Techniques for Material Modification

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