Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Mol, L.; Rocha, Licinio; Cretu, Edmond; Wolffenbuttel, R.F.

doi:10.1088/0960-1317/19/7/074021

Cited by 28 publications

(8 citation statements)

References 13 publications

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“…where λ is the mean free air path at a fixed temperature and is the air gap thickness in the drive combs, tuning combs and sensing parallel plates, respectively equal to , and . The λ value can be estimated as [23]:…”

Section: Air Damping Model For Mems Gyroscopementioning

confidence: 99%

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

2021

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The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered to be the enabling factor for the future development of smart sensing applications, mainly due to their small size, low power consumption and relatively low cost. This paper presents a new structurally and thermally stable design of a resonant mode-matched electrostatic z-axis MEMS gyroscope considering the foundry constraints of relatively low cost and commercially available silicon-on-insulator multi-user MEMS processes (SOIMUMPs) microfabrication process. The novelty of the proposed MEMS gyroscope design lies in the implementation of two separate masses for the drive and sense axis using a unique mechanical spring configuration that allows minimizing the cross-axis coupling between the drive and sense modes. For frequency mismatch compensation between the drive and sense modes due to foundry process uncertainties and gyroscope operating temperature variations, a comb-drive-based electrostatic tuning is implemented in the proposed design. The performance of the MEMS gyroscope design is verified through a detailed coupled-field electric-structural-thermal finite element method (FEM)-based analysis.

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Section: Air Damping Model For Mems Gyroscopementioning

confidence: 99%

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

2021

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“…In 2009, Mol et al performed an experiment on the squeeze-film effect in rarefied air and compared the experimental results with the molecular dynamics model and the model based on the modified Reynolds equation [18]. In 2010, a 3D simulation approach was proposed by Leung et al for modeling the squeeze-film damping on flexible microresonators in highly rarefied air.…”

Section: Introductionmentioning

confidence: 99%

Study on the Dynamic Characteristics of a SiC-Based Capacitive Micro-Accelerometer in Rarefied Air

Xin-min

Wei

2022

Materials

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In this study, we investigated the viscosity, squeeze-film damping, and a SiC-based capacitive micro-accelerometer in rarefied air. A specific expression for the effective viscosity coefficient of the air was derived, and when the air pressure drops from the standard atmospheric pressure, the viscosity of the air will decrease accordingly. Decreases in the air pressure and the viscosity of the air lead to the change in the squeeze-film air damping in the micro-accelerometer, and both the viscous damping force and the elastic damping force of the air film between the moving electrode plate and the fixed electrode plate will also decrease. The damping coefficient and relative damping ratio of the micro-accelerometer in rarefied air were calculated, which was also confirmed by simulations. The changes of the damping coefficient and the relative damping ratio of the system will directly affect the dynamic characteristics of the micro-accelerometer. When the air pressure in the working environment is below the standard atmospheric pressure, the micro-accelerometer will be in an underdamping state. With the decrease in the air pressure, the working bandwidth of the micro-accelerometer will decrease significantly, and the resonant phenomenon may appear. However, the decrease in the air pressure will not have a notable impact on the response time of the micro-accelerometer. Therefore, this work provides a theoretical basis for the study of the performance characteristics of a SiC-based capacitive accelerometer in rarefied air.

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“…For large plates and small gaps, the gas-added spring constant is directly proportional to the pressure and enables species-independent measurements. Squeeze film effects have been investigated with various resonators and regimes [4,[23][24][25][26][27][28][29][30][31][32][33][34][35][36][37].…”

Section: Introductionmentioning

confidence: 99%

Squeeze film pressure sensors based on SiN membrane sandwiches

Naserbakht

Dantan

2019

Sensors and Actuators A: Physical

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We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the range 10 −3 − 50 mbar and the intermembrane coupling induced by the gas is discussed in light of a squeeze film coupled-oscillator model. The high responsivity (several kHz/mbar) and the sub-pascal sensitivity of such simple pressure sensors are attractive for absolute and direct pressure measurements in rarefied air or high vacuum environments.

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Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Cited by 28 publications

References 13 publications

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation

Study on the Dynamic Characteristics of a SiC-Based Capacitive Micro-Accelerometer in Rarefied Air

Squeeze film pressure sensors based on SiN membrane sandwiches

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