Suppressing defects at the interface between the TiO2 electron transport layer (ETL) and perovskite film is critical for high efficiency and stable perovskite solar cells (PSCs). Herein, a siloxane derivative diethylphosphatoethylsilicic acid (PSiOH) is developed to modify the interface of TiO2 ETL/FA0.83Cs0.17PbI3 perovskite. Comprehensive characteristics reveal that silicon hydroxyl (SiOH) in PSiOH can reduce surface defects, improve the electrical properties and optimize the energy band structure of TiO2 by forming a SiOTi bond, while the phosphate bond (PO) in PSiOH can passivate Pb‐related defects on the perovskite bottom surface. Consequently, PSiOH‐modified PSCs yield a remarkable power conversation efficiency of 24.20% and improved air, thermal, or illumination stabilities. This study provides insight into passivation defects at the buried interface for efficient and stable PSCs.