Résumé. 2014 Nous avons réalisé la croissance de 2 hétérostructures GaAs (200 nm)/Sc0,2Yb0,8As (2 nm)/GaAs par épitaxie par jets moléculaires; la première sur une surface nominale (001), et la seconde sur une surface vicinale ((001), 4°vers (111)Ga, charnière [-110] [-110]). The structures have been characterized by reflection high energy electron diffraction, Rutherford backscattering analysis and transmission electron microscopy. The Sc0.2Yb0.8As layer is matched to GaAs and grows in a two-dimensional mode, leading to a high crystalline quality. But the GaAs overlayer contains a high density of planar defects, due to its three-dimensional growth. For the two structures, the nature of the faults, their density, and their distribution are compared. The quality of the GaAs overlayer is improved through growth on a vicinal surface. This conclusion is discussed with respect to the particular growth conditions and resulting morphology of the epilayers.