State-of-the-Art in Mode-Localized MEMS Coupled Resonant Sensors: A Comprehensive Review

Pachkawade, Vinayak

doi:10.1109/jsen.2021.3051240

Cited by 43 publications

(22 citation statements)

References 140 publications

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“…For a relatively small coupling strength

, the two modes of the system are close to each other, and mode overlap is prone to occur. To avoid mode aliasing, it is necessary to satisfy the anti-mode aliasing [ 33 , 34 ] condition

. Thus, the sufficient low damping and higher quality factor need to be considered during the WCR design.…”

Section: Principles and Methods For Modelingmentioning

confidence: 99%

“…In contrast to the sensors based on the mode localization effect, they exhibit the ultra-high parametric sensitivity (up to three to four orders of magnitude [ 31 , 32 , 33 ]) and the coupling between the two resonators is constructed mechanically or electrostatically. In the weakly coupled resonator (WCR), a small perturbation will lead to an energy redistribution [ 34 ].…”

Section: Introductionmentioning

confidence: 99%

“…In the weakly coupled resonator (WCR), a small perturbation will lead to an energy redistribution [ 34 ]. In this case, the amplitude ratio (AR) readout metric can lead to ultra-high sensitivity, and other well-recognized advantages of weakly coupled resonant sensors are linearity and immunity to common-mode noise response [ 33 ]. The mode localization effect based on the WCR structure has been widely used in inertial sensors and biosensors [ 35 ], such as acceleration sensors [ 36 , 37 , 38 ], and tilt sensors [ 39 ], and achieves high sensitivity and low detection limit.…”

Section: Introductionmentioning

confidence: 99%

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Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

Lyu

Wang

et al. 2022

Micromachines

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A mode-localized ΔE-effect magnetic sensor model is established theoretically and numerically. Based on the designed weakly coupled resonators with multi-layer film structure, it is investigated how the ΔE-effect of the magnetostrictive film under the external magnetic field causes the stiffness perturbation of the coupled resonators to induce the mode localization effect. Using the amplitude ratio (AR) as the output in the mode-localized ΔE-effect magnetic sensor can improve the relative sensitivity by three orders of magnitude compared with the traditional frequency output, which has been verified by simulations based on the finite element method (FEM). In addition, the effects of material properties and geometric dimensions on sensor performance parameters, such as sensitivity, linear range, and static operating point are also analyzed and studied in detail, providing the theoretical basis for the design and optimization of the mode-localized ΔE-effect magnetic sensor in different application scenarios. By reasonably optimizing the key parameters of the weekly coupled resonators, a mode-localized ΔE-effect magnetic sensor with the sensitivity of 18 AR/mT and a linear range of 0.8 mT can be achieved.

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“…For a relatively small coupling strength

, the two modes of the system are close to each other, and mode overlap is prone to occur. To avoid mode aliasing, it is necessary to satisfy the anti-mode aliasing [ 33 , 34 ] condition

. Thus, the sufficient low damping and higher quality factor need to be considered during the WCR design.…”

Section: Principles and Methods For Modelingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

Lyu

Wang

et al. 2022

Micromachines

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“…The rapid development of industrial manufacturing has made chromium contamination an increasingly significant focus in the environmental monitoring and food industries [ 1 , 2 , 3 ]. With a group I classification from the International Agency for Research on Cancer, hexavalent chromium (Cr(VI)) can cause genotoxic tumors, genetic defects, asthma, and allergies and harm the environment by accumulating in the ambient environment and food chains [ 4 , 5 , 6 , 7 , 8 , 9 ]. A sensitive detection method needs to be developed to trace Cr(VI) in the environment and food [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

Carnation-like Morphology of BiVO4-7 Enables Sensitive Photoelectrochemical Determination of Cr(VI) in the Food and Environment

Tan

Chen

et al. 2022

Biosensors

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Hexavalent chromium, namely, Cr(VI), is a significant threat to ecological and food safety. Current detection methods are not sensitive to Cr(VI). A photoelectrochemical (PEC) sensor based on bismuth vanadate (BiVO4) was developed for sensitive detection of Cr(VI). First, BiVO4-X (X: the pH of the reaction precursor solution) was synthesized using a facile surfactant-free hydrothermal method. The BiVO4-X morphology was well controlled according to pH values, showing rock-like (X = 1), wrinkled bark-like (X = 4), carnation-like (X = 7), and the collapsed sheet-like morphologies (X = 9, 12). BiVO4-7 exhibited excellent photoelectric performance due to a proper band structure under visible light and a large specific surface area. Then, BiVO4-7 was used to construct a PEC sensor to detect Cr(VI), which was demonstrated to have a low detection limit (10 nM) and wide detection range (2–210 μM). The BiVO4-7 PEC sensor had a stable output signal, as well as excellent reproducibility, repeatability, and selectivity. We used the BiVO4-7 PEC sensor to detect Cr(VI) in real environmental and food samples, resulting in a satisfactory recovery of 90.3–103.0%, as determined by comparison with results obtained using a spectrophotometric method. The BiVO4-7 PEC sensor is promising for practical application to heavy metal detection in the food and environment.

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“…ENSORS using mode localization, or mode-localized sensors, have been extensively studied to realize various high sensitivity MEMS sensors [1]- [4]. The high sensitivity is originating from large amplitude change of weakly coupled resonators (WCRs).…”

Section: Introductionmentioning

confidence: 99%

Characterization of Nonlinear Behavior of Weakly Coupled Resonators Based on Nonlinearity Factor

Ikehashi

Maekoba²,

Parent³

2021

IEEE Sensors J.

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Mode-localization is a promising method to realize high sensitivity sensors, especially in the field of MEMS. Since these sensors monitor amplitude change of weakly coupled resonators, it is important to grasp condition that induces multi-valued amplitude-frequency curve. In this paper, we provide an efficient tool to characterize the nonlinear behavior of the weakly coupled resonators. To analyze the nonlinearity, we solve a two-degrees-of-freedom (2-DoF) coupled equation of motion with nonlinear spring terms. Two approximations are employed to solve the equation; Krylov-Bogoliubov averaging method and approximation based on eigenmode amplitude-ratio at the resonances. As a result, we obtain two decoupled Duffing-like amplitude-frequency equations. We show that nonlinearity of the system is described by factors contained in the equations. The factors can be explicitly written in terms of basic parameters of the system, including coupling spring constant and nonlinear terms. Thus, instead of relying on numerical calculations, we can find parameter condition that brings about multi-valued amplitude-frequency curve. This method can also be utilized to find a condition that eliminates the nonlinearity. As an example, we apply this method to a weakly coupled resonator which uses parallel plate electrode as a coupling spring. We demonstrate the effectiveness and validity of this method by comparing the result with FEM simulations. The methodology and results presented here are general one and can be applied to various systems described by nonlinear coupled resonators.

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State-of-the-Art in Mode-Localized MEMS Coupled Resonant Sensors: A Comprehensive Review

Cited by 43 publications

References 140 publications

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

Carnation-like Morphology of BiVO4-7 Enables Sensitive Photoelectrochemical Determination of Cr(VI) in the Food and Environment

Characterization of Nonlinear Behavior of Weakly Coupled Resonators Based on Nonlinearity Factor

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