Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism

Abstract

A displacement magnifying mechanism is usually employed in a nanopositioning stage to achieve large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. This study proposes a more reasonable model including flexible levers to estimate the stiffness and displacement of the stage. This paper describes an analytic lever model and its experimental verification. Analytic and experimental results were very similar. The model proposed in this study can well predict the stage motions.

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

“…Therefore, the total energy E0 keeps the same and it can be achieved by the following equation: Figure 6. Dynamic model of the proposed 2-DOF piezoelectric-driven platform However, it is difficult to get the accurate solution of equation (25). Hence, FEM method is applied to analyze the dynamic performance of the proposed 2-DOF piezoelectric-driven platform.…”

“…Meanwhile, it also greatly limits the application in 3D cellular bio-assembly systems [8,[21][22][23]. To overcome these shortcomings, one or more motion degrees of freedom are nested inside one basic motion to achieve the nested form platforms [24][25][26]. Nevertheless, most of the previous nested form piezoelectric-driven platforms utilize the basic right-angle and right-circle flexure hinges, which causes great structural stress and influences the whole working lifetime.…”

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

“…Meanwhile, it also greatly limits the application in 3D cellular bio-assembly systems [ 8 , 21 , 22 , 23 ]. To overcome these shortcomings, one or more motion degrees of freedom are nested inside one basic motion to achieve the nested form platforms [ 24 , 25 , 26 ]. Nevertheless, most of the previous nested form piezoelectric-driven platforms utilize the basic right-angle and right-circle flexure hinges, which causes great structural stress and influences the whole working lifetime.…”

Ultra-precise micro-motion stage for optical scanning test

“…Making use of the micro-bending loss characteristics the optical fiber is integrated with micro-bending deformation structures .So that the real-time detection of micro displacement can be achieved, and then the test results will be fed back to the system in order to achieve the precise control and detection. [3,4] …”