Static and dynamic microdeformable mirror characterization by phase-shifting and time-averaged interferometry

Liotard, Arnaud; Muratet, Sylvaine; Zamkotsian, Frédéric; Fourniols, Jean-Yves

doi:10.1117/12.592150

Cited by 14 publications

(17 citation statements)

References 4 publications

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“…Range is increased without loosing accuracy by using two-wavelength phase-shifting interferometry authorizing large steps measurements. 8 All measurements have been confirmed with a Veeco/Wyko NT1100 DMEMS optical profiler.…”

Section: Characterizationmentioning

confidence: 99%

Uniform tilt-angle micromirror array for multi-object spectroscopy

Waldis

Clerc

Zamkotsian

et al. 2007

MOEMS and Miniaturized Systems VI

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We report on micromirror arrays being developed for the use as reflective slit mask in Multi Object Spectrographs for astronomical applications. The micromirrors are etched in bulk single crystal silicon whereas the cantilever type suspension is realized by surface micromachining. One micromirror element is 100µm x 200µm in size. The micromirrors are actuated electrostatically by electrodes located on a second chip. The use of silicon on insulator (SOI) wafers for both mirror and electrode chip ensures thermal compatibility for cryogenic operation. A system of multiple landing beams has been developed, which passively locks the mirror at a well defined tilt angle when actuated. The mechanical tilt angle obtained is 20• at a pull-in voltage of 90V. Measurements with an optical profiler showed that the tilt angle of the actuated and locked mirror is stable with a precision of one arc minute over a range of 15V. This locking system makes the tilt angle merely independent from process variations across the wafer and thus provides uniform tilt angle over the whole array. The precision on tilt angle from mirror to mirror measured is one arc minute. The surface quality of the mirrors in actuated state is better than 10nm peak-to-valley and the local roughness is around 1nm RMS.

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Section: Characterizationmentioning

confidence: 99%

Uniform tilt-angle micromirror array for multi-object spectroscopy

Waldis

Clerc

Zamkotsian

et al. 2007

MOEMS and Miniaturized Systems VI

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“…Features such as optical quality or electromechanical behavior are extracted from these high-precision 3-D component maps. The range is increased without loosing accuracy by using two-wavelength phase-shifting interferometry authorizing measurements of large steps [10]. All measurements have been confirmed with a Veeco/Wyko NT1100 Dynamic MEMS (DMEMS) optical profiler.…”

Section: Characterizationmentioning

confidence: 99%

Arrays of High Tilt-Angle Micromirrors for Multiobject Spectroscopy

Waldis

Zamkotsian

Clerc

et al. 2007

IEEE J. Select. Topics Quantum Electron.

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Abstract-Micromirror arrays are promising components for generating reflective slit masks in future multiobject spectrographs. The micromirrors, 100 µm × 200 µm in size, are etched in bulk single crystal silicon, whereas a hidden suspension is realized by surface micromachining. The micromirrors are actuated electrostatically by electrodes located on a second chip. The use of silicon on insulator (SOI) wafers for both mirror and electrode chip ensures thermal compatibility for cryogenic operation. A system of multiple landing beams has been developed, which latches the mirror at a well-defined tilt angle when actuated. Arrays of 5 × 5 micromirrors have been realized. The tilt angle obtained is 20• at a pull-in voltage of 90 V. Measurements with an optical profiler showed that the tilt angle of the actuated and locked mirror is stable with a precision of 1 arcmin over a range of 15 V. This locking system makes the tilt angle independent from process variations across the wafer and, thus, provides uniform tilt angle over the whole array. The surface quality of the mirrors in actuated state is better than 10-nm peak to valley and the local roughness is about 1-nm root mean square.Index Terms-Deep reactive-ion etch (DRIE), micromirror, microoptoelectromechanical system (MOEMS), mirror array, multiobject spectroscopy (MOS).

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“…For characterising the surface quality and the performance of our MMA's at low temperature, we have developed a cryo chamber optically coupled to a high-resolution Twyman-Green interferometer [6]. The interferometer provides a sub-nanometer accuracy by using phase-shifting technique.…”

Section: Programmable Slit Masksmentioning

confidence: 99%

“…Range is increased without loosing accuracy by using two-wavelength phase-shifting interferometry authorizing large steps measurements. Dynamic analysis like vibration mode and cut-off frequency is also measured with time-averaged interferometry [6].…”

Section: Programmable Slit Masksmentioning

confidence: 99%

MOEMs devices designed and tested for future astronomical instrumentation in space

Zamkotsian¹,

Lanzoni²,

Noell³

et al. 2017

International Conference on Space Optics — ICSO 2008

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Next generation of astronomical instrumentation for space telescopes requires Micro-Opto-ElectroMechanical Systems (MOEMS) with remote control capability and cryogenic operation. MOEMS devices have the capability to tailor the incoming light in terms of intensity and object selection with programmable slit masks, in terms of phase and wavefront control with micro-deformable mirrors, and finally in terms of spectrum with programmable diffraction gratings. Applications are multi-object spectroscopy (MOS), wavefront correction and programmable spectrographs. We are engaged since several years in the design, realization and characterization of MOEMS devices suited for astronomical instrumentation.

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Static and dynamic microdeformable mirror characterization by phase-shifting and time-averaged interferometry

Cited by 14 publications

References 4 publications

Uniform tilt-angle micromirror array for multi-object spectroscopy

Uniform tilt-angle micromirror array for multi-object spectroscopy

Arrays of High Tilt-Angle Micromirrors for Multiobject Spectroscopy

MOEMs devices designed and tested for future astronomical instrumentation in space

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