Since micro deformable mirrors based on Micro-Opto-Electronico-Mechanical Systems (MOEMS) technology would be essential in next generation adaptive optics system, we are designing, realizing, characterizing and modeling this key-component. Actuators and a continuous-membrane micro deformable mirror (3*3 actuators, 600*600 µm 2 ) have been designed in-house and processed by surface micromachining in the Cronos foundry. A dedicated characterization bench has been developed for the complete analysis. This Twyman-Green interferometer allows high in-plane resolution (4µm) or large field of view (40mm). Out-of-plane measurements are performed with phase-shifting interferometry showing highly repeatable results (standard deviation<5nm). Features such as optical quality or electromechanical behavior are extracted from these high precision three-dimensional component maps and FEM can be fitted. Dynamic analysis like vibration mode and cut-off frequency is realized with time-averaged interferometer. The deformable mirror exhibit a 350nm stroke for 35 volts on the central actuator. This limited stroke could be overcome by changing the components material and promising actuators are made with polymers.

System level simulation results of a planar electrostatic micromotor, based on analytical models of the static and dynamic torque behaviours, are presented. A planar variable capacitance (VC) electrostatic micromotor designed, fabricated and tested at LAAS (Toulouse) in 1995 is simulated using the high level language VHDL-AMS (VHSIC (very high speed integrated circuits) hardware description language-analog mixed signal). The analytical torque model is obtained by first calculating the overlaps and capacitances between different electrodes based on a conformal mapping transformation. Capacitance values in the order of 10 −16 F and torque values in the order of 10 −11 N m have been calculated in agreement with previous measurements and simulations from this type of motor. A dynamic model has been developed for the motor by calculating the inertia coefficient and estimating the friction-coefficient-based values calculated previously for other similar devices. Starting voltage results obtained from experimental measurement are in good agreement with our proposed simulation model. Simulation results of starting voltage values, step response, switching response and continuous operation of the micromotor, based on the dynamic model of the torque, are also presented. Four VHDL-AMS blocks were created, validated and simulated for power supply, excitation control, micromotor torque creation and micromotor dynamics. These blocks can be considered as the initial phase towards the creation of intellectual property (IP) blocks for microsystems in general and electrostatic micromotors in particular.

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