Reliability modelling and analysis of thermal MEMS

Muratet, Sylvaine; Lavu, Srikanth; Fourniols, Jean-Yves; Bell, George I.; Desmulliez, Marc Phillipe Yves

doi:10.1088/1742-6596/34/1/039

Cited by 17 publications

(11 citation statements)

References 5 publications

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“…Most of the MEMS modeling and simulation tools are based on Verilog-AMS, VHDL-AMS, MATLAB, or some other modeling language. Also, there are a numerous number of libraries consisting of mathematical models of specific devices which are modeled by particular personnel dealing with particular applications [10]. Apart from all these, the designer may also choose to analyze the design at the lowest possible abstraction level i.e., to perform FEM based simulation and verification on the considered designs.…”

Section: Description Of the Best Practice Design Methodsmentioning

confidence: 99%

A Design Methodology for the Yield Enhancement of MEMS Designs with Respect to Process Induced Variations

Vudathu

Laur

2007

2007 Proceedings 57th Electronic Components and Technology Conference

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The intricacy in the manufacturing of MEMS devices has resulted in decreasing parametric yields. The problem of reduced parametric yield is increasing with the waning feature sizes. The necessity for yield enhancement in MEMS designs and particularly in commercial MEMS is being increasingly felt by the industry and therefore by the designers. There has been no standard methodology that could be followed to enhance yield in the design phase. In this paper we undertake effort in order to standardize a best practice design method in order to achieve a better yield in the design phase. The method is still in its infancy and has good scope for development. The validity of the proposed method is demonstrated via a simulation based approach on a U-Shaped micro electro thermal actuator.

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Section: Description Of the Best Practice Design Methodsmentioning

confidence: 99%

A Design Methodology for the Yield Enhancement of MEMS Designs with Respect to Process Induced Variations

Vudathu

Laur

2007

2007 Proceedings 57th Electronic Components and Technology Conference

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“…The sensitivity factors of variables a and r are computed with Eq. (14): S a_Temperature = 0; S a_strain = 0.52; S a_stress = 0.53; S a_deflection = 0.79; S r_Temperature = 0.0046; S r_strain = 0.67; S r_stress = 0.74; S r_deflection = 0.99. That suggests that design engineers could implement desired function by adjusting the two properties.…”

Section: Analysis Of Parameter Sensitivitymentioning

confidence: 99%

“…So quite a few researchers tended to the second one based on modeling approach which could provide deeper study from the point of physical mechanism with better efficiency and less expense. Muratet [14] and Matmat [15] built a ''virtual prototype'' using VHDL-AMS language, aiming at estimating reliability of micro actuators based on failure data. Melle introduced a reliability modeling method to describe the dielectric charging kinetic [16].…”

Section: Introductionmentioning

confidence: 99%

Multiphysics modeling approach for micro electro–thermo–mechanical actuator: Failure mechanisms coupled analysis

Wang

Zeng

Silberschmidt

et al. 2015

Microelectronics Reliability

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“…5(A) and 5(B) respectively. This model has been taken from [13]. The Ushaped micro electro thermal actuator is composed of two suspended arms with non-similar cross-sections.…”

Section: Model Specificationmentioning

confidence: 99%

A Critical Enhancement in the Yield Analysis of Microsystems

Vudathu

Boning

Laur

2007

2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual

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Yield analysis of microsystems is increasingly becoming important due to their decreasing feature sizes. Despite many ways and methods for statistical yield analysis, the contribution of worstcase methods in the yield analysis of microsystems is significant. Worst-case methods, in general, offer advantages like reduced number of simulations and a quantifiable yield metric in yield analysis of a system. However, the common yield analysis problems in MEMS and other microsystems have been identified to be falling into the category of non-linear specification boundaries. In this paper we present an enhancement to the yield analysis of microsystems using worst-case methods. The enhancement has been achieved in terms of accuracy of the parametric yield calculation process by considering non-linear metamodels in place of linear main-effect models. A function suite (WCAS) has been developed in order to implement the worst-case analysis and compare the results of the pre and post enhancements. The demonstrator used for comparing the results of pre and post enhanced worst-case analysis was a U-Shaped thermal actuator.

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Reliability modelling and analysis of thermal MEMS

Cited by 17 publications

References 5 publications

A Design Methodology for the Yield Enhancement of MEMS Designs with Respect to Process Induced Variations

A Design Methodology for the Yield Enhancement of MEMS Designs with Respect to Process Induced Variations

Multiphysics modeling approach for micro electro–thermo–mechanical actuator: Failure mechanisms coupled analysis

A Critical Enhancement in the Yield Analysis of Microsystems

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