Static response and stiction analysis of MEMS micromembranes for optical applications

Pustan, Marius; Dudescu, Cristian; Bîrleanu, Corina

doi:10.1002/pssc.201510096

Cited by 5 publications

(5 citation statements)

References 8 publications

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“…In [20] is suggested that single asperity contact occurs when the adhesive force acting on the asperity deforms it by at least the RMS roughness. Then, using the model proposed by the authors in [19] the results were extrapolated to the entire length of contact between AFM tip and samples. In interpreting the data presented in the ambient temperature at different values of relative humidity it was necessary to assume a value for Kelvin radius as 0.4 nm and to establish the equilibrium separation.…”

Section: Discussionmentioning

confidence: 99%

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Humidity influence on the adhesion of SU-8 polymer from MEMS applications

et al. 2017

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Abstract. In this paper, the adhesion behaviors of SU-8 polymer thin film from MEMS application were investigated as a function of relative humidity. The adhesion test between the AFM tip and SU-8 polymer have been extensively studied using the atomic force microscope (AFM), for a relative humidity (RH) varying between 20 and 90%. The samples for tests are SU-8 polymers hard baked at different temperatures. The hard bake temperature changes the tribo-mechanical properties of polymers. The paper reports the measurements and the modeling of adhesion forces versus humidity in controlled ranges between 20 to 90%RH. To investigate the effect of relative humidity on adhesion for SU-8 polymer hard baked we used an analytical method which encompasses the effect of capillarity as well as the solid-to-solid interaction. While the capillary force expression is considered to be the sum of the superficial tension and the Laplace force for the solid-solid interaction is expressed by the Derjagin, Muller and Toropov (DMT) model of solids adhesion. The analytical results obtained are in accordance with those obtained experimentally.

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Section: Discussionmentioning

confidence: 99%

“…Studying the contact line segment, it was established that there were 15 contact points which were modelled as the contact between the sphere and a plane due to the roughness of SU-8 and AFM tip. Then the total adhesion was computed according to [19] and the results are presented in Fig. 5.…”

Section: Analytical Interpretation Of Adhesion Forcementioning

confidence: 99%

Humidity influence on the adhesion of SU-8 polymer from MEMS applications

et al. 2017

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“…The thermal gradient deforms the micromirror based on thermal dilatation of structure. Moreover, the modulus of elasticity decreases under the thermal relaxation effect of material with influence on the mechanical response of system [4]. The mechanical response of system depends on the out-of-the plane stiffness that is directly proportional with the modulus of elasticity of material.…”

Section: Temperature Effect On the Optical Mems Component Responsementioning

confidence: 99%

“…A thermal gradient introduces softening due to Young's modulus -temperature relation and a thermal relaxation, which changes the rigidity of material [4,5]. The lifetime of optical MEMS devices can also be influenced by temperature.…”

Section: Introductionmentioning

confidence: 99%

Impact of environmental conditions on the reliability of MEMS components from optical applications

2017

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Abstract. The reliability design and the lifetime of MEMS from optical applications is strongly dependent on the operating conditions. In optical devices an additional stress is introduced by the temperature gradient appearing during operation. The thermal stress introduced in the structure modifies the component response and its lifetime. The investigated sample is a micromirror fabricated from gold using the MEMS technologies and tested by an atomic force microscope. The scope is to analyse the temperature and relative humidity influence on the mechanical and tribological behaviours. Using a mechanical force given by the bending deflection and stiffness of the AFM probe, the dependence between the applied force and the micromirror deformation is monitored as a function of temperature. By increasing the temperature of structures the stiffness decreases based on the thermal relaxation of the material. If the relative humidity increases the adhesion between the micromirror and substrate is improved based on the capillarity effect. The results obtained are useful to MEMS designers who can predict the micromirror response as a function of the operating conditions with influence on the actuation energy, the accuracy in response and the system lifetime.

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“…Stiction is one of the most important and unavoidable failure problems of micromembranes under large deflection. Stiction is the adhesion of contacting surfaces due to surface forces (van der Waals, capillary forces, Casmir forces, hydrogen bridging, and electrostatic forces) [6]. The restorative force (pull-off force) of a micromembrane from substrate, opposite to the adhesion force, depends on the micromembrane stiffness.…”

Section: Introductionmentioning

confidence: 99%

Nanocharacterization of the Mechanical and Tribological Behavior of MEMS Micromembranes

Pustan¹,

Dudescu²,

Bîrleanu³

et al. 2017

Nanomechanics

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This chapter presents the experimental investigation and numerical simulation of micromembranes supported by serial-parallel connected hinges. The micromembranes can be used in optical applications or as the flexible mechanical element in radio frequency microelectromechanical system switches. A method to determine the micromembrane stiffness is presented. Experimentally, the out-of-plane micromembranes deflection is performed using an atomic force microscope. The dependence between deflection and the applied force gives the sample stiffness. The flexible plate of micromembranes is directly deflected to substrate, and the adhesion force is measured. The micromembranes are electroplated with gold, and two series of the serial connected hinges are investigated. Each of them has different parallel connected hinges. The experimental results of stiffness and adhesion force are compared with analytical and numerical results. The presented method is also applied to determine the stiffness of micromembranes supported by other types of hinges.

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Static response and stiction analysis of MEMS micromembranes for optical applications

Cited by 5 publications

References 8 publications

Humidity influence on the adhesion of SU-8 polymer from MEMS applications

Humidity influence on the adhesion of SU-8 polymer from MEMS applications

Impact of environmental conditions on the reliability of MEMS components from optical applications

Nanocharacterization of the Mechanical and Tribological Behavior of MEMS Micromembranes

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