Stiffness and Sensitivity Analysis of Microcantilever Based Piezoresistive Sensor for Bio-MEMS Application

Rotake, Dinesh; Darji, Anand D.

doi:10.1109/icsens.2018.8589732

Cited by 16 publications

(12 citation statements)

References 7 publications

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“…The molecular spring constants can, in principle, be obtained experimentally and there have been several studies on their direct measurement [30][31][32][33][34] . For example, in the work of Xu et al 33 , the spring constants of two small molecules, 1,8-octanedithiol and 4,4'-bipyridine, were measured in a setup consisting of two gold electrodes and a molecular junction.…”

Section: J O U R N a L Na Mementioning

confidence: 99%

Predicting the bulk modulus of single-layer covalent organic frameworks with square-lattice topology from molecular building-block properties

2021

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Section: J O U R N a L Na Mementioning

confidence: 99%

Predicting the bulk modulus of single-layer covalent organic frameworks with square-lattice topology from molecular building-block properties

2021

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“…Hence, the microcantilever encapsulating p‐type polysilicon resistor is used with doping density

false(N_{normald} false) = 10^{18} c {normalm}^{- 3}

. Previously, we have optimised the dimensions and type of power supply is useful for the piezoresistive sensor to avoid self‐heating effect using COMSOL Multiphysics 5.3 software [30]. The proposed piezosensor design uses the optimised length ( L = 220 μm), width ( W = 80 μm) and thickness ( T = 0.625 μm) as shown in Fig.…”

Section: Piezoresistive Sensor Design For Biomems Applicationmentioning

confidence: 99%

Fabrication, calibration, and preliminary testing of microcantilever‐based piezoresistive sensor for BioMEMS applications

Rotake

Darji

Kale

2020

IET nanobiotechnol.

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In this study, the authors demonstrate the fabrication, calibration, and testing of a piezoresistive microcantileverbased sensor for biomedical microelectromechanical system (BioMEMS) application. To use any sensor in BioMEMS application requires surface modification to capture the targeted biomolecules. The surface alteration comprises self-assembled monolayer (SAM) formation on gold (Au)/chromium (Cr) thin films. So, the Au/Cr coating is essential for most of the BioMEMS applications. The fabricated sensor uses the piezoresistive technique to capture the targeted biomolecules with the SAM/Au/Cr layer on top of the silicon dioxide layer. The stiffness (k) of the cantilever-based biosensor is a crucial design parameter for the low-pressure range and also influence the sensitivity of the microelectromechanical system-based sensor. Based on the calibration data, the average stiffness of the fabricated microcantilever with and without Au/Cr thin film is 141.39 and 70.53 mN/m, respectively, which is well below the maximum preferred range of stiffness for BioMEMS applications. The fabricated sensor is ultra-sensitive and selective towards Hg 2+ ions in the presence of other heavy metal ions (HMIs) and good enough to achieve a lower limit of detection 0.75 ng/ml (3.73 pM/ml).

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“…The stiffness ( k ) of the fabricated piezoresistive sensor measured using AFM is 131–146 mN/m, which is well below the stiffness required for BioMEMS applications (1000 mN/m [ 41 – 42 ]). COMSOL 5.3 software is used to perform design and simulation of the piezoresistive sensor to optimize the dimensions for better stiffness and sensitivity [ 43 ]. The fabricated piezoresistive sensor layer structure with thickness, FESEM image, PCB, and the experimental platform is shown in Fig.…”

Section: Fabrication and Calibration Of The Piezoresistive Devicementioning

confidence: 99%

Ultrasensitive detection of cadmium ions using a microcantilever-based piezoresistive sensor for groundwater

Rotake

Darji

Kale

2020

Beilstein J. Nanotechnol.

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This paper proposes the selective and ultrasensitive detection of Cd(II) ions using a cysteamine-functionalized microcantilever-based sensor with cross-linked ᴅʟ-glyceraldehyde (DL-GC). The detection time for various laboratory-based techniques is generally 12–24 hours. The experiments were performed to create self-assembled monolayers (SAMs) of cysteamine cross-linked with ᴅʟ-glyceraldehyde on the microcantilever surface to selectively capture the targeted Cd(II). The proposed portable microfluidic platform is able to achieve the detection in 20–23 min with a limit of detection (LOD) of 0.56 ng (2.78 pM), which perfectly describes its excellent performance over other reported techniques. Many researchers used nanoparticle-based sensors for the detection of heavy metal ions, but daily increasing usage and commercialization of nanoparticles are rapidly expanding their deleterious effect on human health and the environment. The proposed technique uses a blend of thin-film and microcantilever (micro-electromechanical systems) technology, which mitigate the disadvantages of the nanoparticle approaches, for the selective detection of Cd(II) with a LOD below the WHO limit of 3 μg/L.

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Stiffness and Sensitivity Analysis of Microcantilever Based Piezoresistive Sensor for Bio-MEMS Application

Cited by 16 publications

References 7 publications

Predicting the bulk modulus of single-layer covalent organic frameworks with square-lattice topology from molecular building-block properties

Predicting the bulk modulus of single-layer covalent organic frameworks with square-lattice topology from molecular building-block properties

Fabrication, calibration, and preliminary testing of microcantilever‐based piezoresistive sensor for BioMEMS applications

Ultrasensitive detection of cadmium ions using a microcantilever-based piezoresistive sensor for groundwater

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