Storing Matter: A new quantitative and sensitive analytical technique

The storing matter technique is applied in quadrupole type SIMS analyser. Its analytical chamber is additionally equipped with a special magnetically driven x, Θ, UHV manipulator applied for transfer of the metal ring collector. The sample holder, horizontally positioned, carries the analysed sample as well as a watch like rotation mechanism carrying a continuously rotating collector of 1 inch diameter at a rate of 1 rev. per hour. The procedure includes cleaning of the collector with the ion beam, the collector reverse, sputter deposition of the analysed material from the sample onto the clean surface of the collector, reversal of the sample and analysis of the stored material. The whole procedure is performed in one analytical chamber, using a Physical Electronics 06-350E sputter ion gun and QMA-410 Balzers quadrupole mass analyser. The procedure is tested on pure chromium and is applied to an inconel alloy implanted with 120 keV Cr 2+ and 145 keV Y 2+. The SIMS results are obtained using 5 and 3 keV Ar + ion beam at 45°incidence angle. As the collector, we use high purity titanium. The obtained depth profile analysis of the inconel alloy shows that the 'matrix effect' is largely reduced when compared with standard SIMS analysis. The storing matter procedure was performed with the use of oxygen flooding (during sputter deposition and during SIMS analysis). Results show significant improvement with respect to the use of this technique without oxygen flooding.

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“…4 ). Oxygen flooding was used during SM procedure, and O 2 pressures were: 6 × 10 À6 Torr and 8 × 10 À7 Torr.…”

Section: Methodsmentioning

confidence: 93%

“…Such a procedure has been applied recently and used for analysis of several materials. [4][5][6] So far, however, the processes of ion erosion/deposition and SIMS analysis are performed in two separate vacuum chambers. The substrate with the deposit has to be transported between the two chambers with the use of an ultra-high vacuum case.…”

Section: Introductionmentioning

confidence: 99%

Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Konarski

Miśnik

Zawada

et al. 2014

Surface & Interface Analysis

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“…In order to avoid this matrix effect in SIMS, [1] the storing matter technique was developed. [2][3][4] It decouples the analysis step from the sputtering of the specimen: in the first step, the sputtered particles (neutrals and ionized atoms and molecules) are deposited on a collector material in the submonolayer range; the collector with deposit is transferred to the analytical instrument under ultrahigh vacuum conditions using a dedicated suitcase, [5] and in the second step, the deposit is analysed with dynamic or static SIMS. For inorganic samples, our studies show that the storing matter technique has a quantitative potential while keeping the high sensitivity of SIMS.…”

Section: Introductionmentioning

confidence: 99%

Fragmentation of polystyrene during sputter deposition in the storing matter instrument

Turgut

Wirtz²,

Belmahi

et al. 2014

Surface & Interface Analysis

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19th International Conference on Secondary Ion Mass Spectrometry (SIMS), Jeju, SOUTH KOREA, SEP 29-OCT 04, 2013International audienceThe storing matter technique has been developed to get easier quantification in secondary ion mass spectrometry (SIMS) by decoupling the sputtering step from the analysis step. First, the matter is deposited in the submonolayer range on a collector that is analysed next by SIMS. Most work on the storing matter technique has been carried out for inorganic samples. The technique has also been applied successfully to organic samples. In this work, the fragmentation of polystyrene (PS) molecule deposited on silver (Ag) during storing matter deposition is investigated using static SIMS analysis with Bi-3(+) clusters. The fragmentation of PS at different coverages is studied by calculating the ratios of large-to-small peak intensities of fingerprint spectra. These ratios are compared with those obtained previously by the storing matter technique using Ar+ as analysis beam in time-of-flight-SIMS. Different degrees of fragmentation are observed with varying coverage, suggesting different sticking factors of fragments on the collector. Compared with Bi-3(+), the Ar+ projectile produces a higher amount of large fragments and is found to be better suited for the analysis of PS deposits on silver collectors. In both situations, C7H7+ is the major fragment in the mass spectra

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“…[9,10] Three main sections can be distinguished: i) the preparation of the collector surface by thin-film deposition; ii) the sputtering of the sample and deposition of emitted material on the collector surface; and iii) Ultra high vacuum (UHV) transfer of the collectors in the prototype itself and to the analytical instruments. All these processes are done under UHV conditions.…”

Section: Introductionmentioning

confidence: 99%

“…[13] To measure the sensitivity of the Storing Matter technique, a parameter called Storing Matter Useful Yield (UY StoMat ) is used. [9,10,14,15] UY StoMat is defined as the ratio between the total counts of a given element M +/− detected during the analysis of the collector and the number of atoms M initially sputtered from the sample. As UY StoMat depends on both the sputter-deposition process and the analysis step, it can be written as follows:…”

Section: Introductionmentioning

confidence: 99%

Storing Matter: a new analytical technique developed to improve the sensitivity and the quantification during SIMS analyses

Мансилла¹,

Wirtz²

2010

Surface & Interface Analysis

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Storing Matter: A new quantitative and sensitive analytical technique

Cited by 21 publications

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Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Storing matter technique performed in the analytical chamber of a quadrupole SIMS analyser

Fragmentation of polystyrene during sputter deposition in the storing matter instrument

Storing Matter: a new analytical technique developed to improve the sensitivity and the quantification during SIMS analyses

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