2009
DOI: 10.1063/1.3207795
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Strain relaxation in epitaxial Pt films on (001) SrTiO3

Abstract: The relationship between strain relaxation and microstructure evolution of epitaxial, (001)-oriented Pt thin films on (001) SrTiO3 substrates is investigated as a function of Pt film thickness. X-ray diffraction shows that the Pt films gradually relax after film coalescence with increasing film thickness. The Pt film surfaces exhibit a cross-hatched surface pattern that increases in amplitude and density with film thickness and is due to progressive relaxation of the lattice mismatch strain by twinning. The po… Show more

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Cited by 19 publications
(17 citation statements)
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“…Such large strain is energetically much less favorable than the 0.46% in the present work. It has been shown that (100)‐oriented 13 nm thick Pt films prepared by sputtering exhibited 0.3% out‐of‐plane strain. The twin structures observed from transmission electron microscopy were most likely responsible for an earlier onset of strain relaxation compared to the (100) Pt presented in this work, where no twinning has been observed in XRD or SEM studies.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Such large strain is energetically much less favorable than the 0.46% in the present work. It has been shown that (100)‐oriented 13 nm thick Pt films prepared by sputtering exhibited 0.3% out‐of‐plane strain. The twin structures observed from transmission electron microscopy were most likely responsible for an earlier onset of strain relaxation compared to the (100) Pt presented in this work, where no twinning has been observed in XRD or SEM studies.…”
Section: Resultsmentioning
confidence: 99%
“…Several deposition techniques can in principle be used to produce thin Pt films. They vary from electrodeposition, sputtering, e‐beam evaporation, and atomic layer deposition to PLD . PLD is a technique used for the thin films preparation for a variety of materials .…”
Section: Introductionmentioning
confidence: 99%
“…25 Pt grows in cube-on-cube epitaxial orientation on SrTiO 3 . 25 Pt films were post-growth annealed at 1000 C for 10 min in oxygen.…”
mentioning
confidence: 99%
“…25 Pt grows in cube-on-cube epitaxial orientation on SrTiO 3 . 25 Pt films were post-growth annealed at 1000 C for 10 min in oxygen. BST films were grown by MBE (GEN 930 Veeco instrument), using solid source effusion cells for supplying Ba and Sr and a metal organic precursor for Ti (titanium tetra isopropoxide or TTIP), i.e., the hybrid approach used previously for SrTiO 3 , described elsewhere.…”
mentioning
confidence: 99%
“…Epitaxial Pt bottom electrodes, 100-nm-thick, were grown on (001) SrTiO 3 single crystals by DC sputtering, as described elsewhere, 16 and annealed at 1000 C for 10 min in oxygen. BST films were grown by hybrid molecular beam epitaxy, described previously.…”
mentioning
confidence: 99%