Stress control in optical thin films by sputtering and electron beam evaporation

Tajima, Naoya; Murotani, Hiroshi; Matsumoto, Shigeharu; Honda, Hiromitsu

doi:10.1364/ao.56.00c131

Cited by 11 publications

(3 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The device using sputtering strategies shows ~5–15% higher performance than that using E-beam deposition. Generally, magnetic sputtering can demonstrate a higher uniformity and film density than E-beams, which further affects the mechanical, electrical, and thermal contacts 47 , eventually improving the performance of PTE detectors.…”

Section: Resultsmentioning

confidence: 99%

An infrared photothermoelectric detector enabled by MXene and PEDOT:PSS composite for noncontact fingertip tracking

Wang

Xie²,

Lu³

et al. 2023

Microsyst Nanoeng

View full text Add to dashboard Cite

Photothermoelectric (PTE) detectors functioning on the infrared spectrum show much potential for use in many fields, such as energy harvesting, nondestructive monitoring, and imaging fields. Recent advances in low-dimensional and semiconductor materials research have facilitated new opportunities for PTE detectors to be applied in material and structural design. However, these materials applied in PTE detectors face some challenges, such as unstable properties, high infrared reflection, and miniaturization issues. Herein, we report our fabrication of scalable bias-free PTE detectors based on Ti3C2 and poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS) composites and characterization of their composite morphology and broadband photoresponse. We also discuss various PTE engineering strategies, including substrate choices, electrode types, deposition methods, and vacuum conditions. Furthermore, we simulate metamaterials using different materials and hole sizes and fabricated a gold metamaterial with a bottom-up configuration by simultaneously combining MXene and polymer, which achieved an infrared photoresponse enhancement. Finally, we demonstrate a fingertip gesture response using the metamaterial-integrated PTE detector. This research proposes numerous implications of MXene and its related composites for wearable devices and Internet of Things (IoT) applications, such as the continuous biomedical tracking of human health conditions.

show abstract

Section: Resultsmentioning

confidence: 99%

An infrared photothermoelectric detector enabled by MXene and PEDOT:PSS composite for noncontact fingertip tracking

Wang

Xie²,

Lu³

et al. 2023

Microsyst Nanoeng

View full text Add to dashboard Cite

show abstract

“…Meanwhile, the contact angle of the photocatalytic glass temporarily increased after storage in the dark, but it decreased again after UV irradiation on the IVC-22 Conference We have developed a combination coating method wherein electron beam (EB) deposition and direct current (DC) pulse sputtering are operated simultaneously in the same vacuum chamber. We have successfully reduced the refractive index of SiO 2 optical thin films [4][5][6]. In the combination coating method, the film structure becomes columnar and has a low-density, resulting in a low refractive index.…”

Section: Introductionmentioning

confidence: 99%

Super Hydrophilic Low Refractive Index SiO<sub>2</sub> Optical Thin Films Deposited by Using a Combination Coating Method

Ito,

Tajima,

Murotani

et al. 2023

e-J. Surf. Sci. Nanotechnol.

Self Cite

View full text Add to dashboard Cite

In this study, we evaluated the hydrophilicity of low-refractive-index SiO 2 optical thin films deposited using a combination coating method of electron beam (EB) deposition and direct current pulse sputtering. In this deposition method, the introduction of process gas during deposition deteriorates the vacuum level, shortens the mean free path of deposited particles, and produces low-refractive-index films due to the low density associated with the columnar structure. Furthermore, the refractive index of the thin film deposited by using the combination coating method was 1.28. The low density of the thin film increases the surface roughness of the thin film, resulting in hydrophilic properties (contact angle, θ ≤ 10°). Although conventional EB deposition also exhibited hydrophilicity (contact angle, θ ≤ 10°) immediately after film deposition, the contact angle increased about 1 week after film deposition and lost its hydrophilicity after 1 year (contact angle, θ = 47°). The cause of this factor is the deposition of hydrocarbons in the air. However, the combination coating method obtained high hydrophilicity (contact angle, θ ≤ 10°) even after 1 year of deposition. The possible reason is the chemical termination by sputtering plasma besides the structural factor of the surface roughness, which is sufficient to sustain the hydrophilicity for 1 year.

show abstract

“…[18][19][20][21] In addition, the phonon frequency in singlecrystal Si was estimated using the combined method and modeling. 22) Nanoindentation is frequently used to measure the elastic modulus and hardness of structural materials, 23,24) and group velocity can be estimated from the elastic modulus. Therefore, the combined method has the potential to measure the phonon transport properties of amorphous materials, which can be used to elucidate the origin of their ultralow thermal conductivity.…”

mentioning

confidence: 99%

Origin of ultralow thermal conductivity in amorphous Si thin films investigated using nanoindentation, 3ω method, and phonon transport analysis

Tanisawa,

Takizawa,

Yamaguchi

et al. 2023

Appl. Phys. Express

Self Cite

View full text Add to dashboard Cite

The origin of the ultralow thermal conductivity in amorphous Si thin films was investigated by comparing their phonon transport properties with those of single-crystal Si. The group velocity and thermal conductivity were measured at 300 K using nanoindentation and the 3ω method, respectively. The phonon mean free path (MFP) and phonon frequency were determined using the measured properties and models. The scattering in the disordered structure of amorphous Si thin films caused a significant decrease in the phonon MFP with increase in the phonon frequency, leading to ultralow thermal conductivity. However, the group velocity was unaffected by the disordered structure.

show abstract

Stress control in optical thin films by sputtering and electron beam evaporation

Cited by 11 publications

References 8 publications

An infrared photothermoelectric detector enabled by MXene and PEDOT:PSS composite for noncontact fingertip tracking

An infrared photothermoelectric detector enabled by MXene and PEDOT:PSS composite for noncontact fingertip tracking

Super Hydrophilic Low Refractive Index SiO<sub>2</sub> Optical Thin Films Deposited by Using a Combination Coating Method

Origin of ultralow thermal conductivity in amorphous Si thin films investigated using nanoindentation, 3ω method, and phonon transport analysis

Contact Info

Product

Resources

About