Stress Effects and Compensation of Bias Drift in a MEMS Vibratory-Rate Gyroscope

Tatar, Erdinc; Mukherjee, Tamal; Fedder, Gary K.

doi:10.1109/jmems.2017.2675452

Cited by 52 publications

(21 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As can be seen from the equation (9), if the edge effect is taken into consideration, the capacitor would not have the linear relationship with the overlap length (l1) any more, and size of the capacitor would become bigger.…”

Section: Design Of the Width Of Driving Comb Teethmentioning

confidence: 99%

“…Over the past decades, a significant amount of research on the vibratory gyroscope with different kinds of structures has been directed towards the development of high performance and small size MEMS gyroscopes for various applications. The typical structures of MEMS gyroscopes include turning fork [4][5][6][7][8], comb [9][10][11], ring or disk [12][13][14][15], micro wineglass [16][17][18], etc. Among them, a structure called "Butterfly" gyroscope was firstly proposed by G. Andersson [19,20].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A Novel High-Sensitivity Butterfly Gyroscope Driven by Horizontal Driving Force

Xiao

Hou

et al. 2019

IEEE Sensors J.

View full text Add to dashboard Cite

Sensitivity is an important performance index of micro-machined gyroscope, and driving amplitude and initial capacitance gap are related to the signal-noise ratio as well as the sensitivity of gyroscope. The traditional butterfly gyroscope in our research group will generate both horizontal and vertical driving amplitude when driven in driving mode. So, the signal-noise ratio is subjected to the vertical driving displacement and initial capacitance gap, which, to a great extent, limits its sensitivity. In this paper, a novel high-sensitivity butterfly gyroscope with rectangle vibration beam was proposed, which will generate almost only horizontal displacement due to the structural characteristics when driven by horizontal driving force. Therefore, the proposed structure can not only increase the driving amplitude, but also reduce the initial capacitance gap, so as to enhance the signal-noise ratio as well as sensitivity of the gyroscope. After the structural design and manufacture processing, the performance of the proposed butterfly gyroscope was tested, and the angle random walk (ARW) is measured to be 1.244deg/√h, and the bias stability reached 3.58deg/h.

show abstract

Section: Design Of the Width Of Driving Comb Teethmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Novel High-Sensitivity Butterfly Gyroscope Driven by Horizontal Driving Force

Xiao

Hou

et al. 2019

IEEE Sensors J.

View full text Add to dashboard Cite

show abstract

“…A significant amount of research has been carried out on the different kinds of micromachined gyroscopes over the past decades, which has directly promoted the development of high performance gyroscopes for various applications. Among the different kinds of MEMS gyroscopes, the typical structures include turning forks (TFG) [4][5][6][7][8], combs [9][10][11], rings or disks [12][13][14][15], or micro wineglass [16][17][18].…”

Section: Introductionmentioning

confidence: 99%

A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam

Hou

Kuang

et al. 2019

Micromachines

View full text Add to dashboard Cite

In this paper, a tuning fork gyroscope with a polygon-shaped vibration beam is proposed. The vibration structure of the gyroscope consists of a polygon-shaped vibration beam, two supporting beams, and four vibration masts. The spindle azimuth of the vibration beam is critical for performance improvement. As the spindle azimuth increases, the proposed vibration structure generates more driving amplitude and reduces the initial capacitance gap, so as to improve the signal-to-noise ratio (SNR) of the gyroscope. However, after taking the driving amplitude and the driving voltage into consideration comprehensively, the optimized spindle azimuth of the vibration beam is designed in an appropriate range. Then, both wet etching and dry etching processes are applied to its manufacture. After that, the fabricated gyroscope is packaged in a vacuum ceramic tube after bonding. Combining automatic gain control and weak capacitance detection technology, the closed-loop control circuit of the drive mode is implemented, and high precision output circuit is achieved for the gyroscope. Finally, the proposed Micro Electro Mechanical Systems (MEMS) gyroscope system demonstrates a bias instability of 0.589°/h, an angular random walk (ARW) of 0.038°/√h, and a bandwidth of greater than 100 Hz in a full scale range of ± 200°/s at room temperature.

show abstract

“…For this reason, these methods cannot achieve real-time mode-matching. However, in practical applications, the frequency split of the gyroscope mode varies with changes in environmental parameters [ 13 , 14 , 15 ]. Therefore, one-time matching cannot meet the requirements.…”

Section: Introductionmentioning

confidence: 99%

MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation

Zhao

et al. 2018

Sensors

View full text Add to dashboard Cite

In order to solve the problem where existing mode-matching methods in microelectromechanical systems (MEMS) vibrating gyroscopes fail to meet real-time and reliability requirements, this paper presents a novel method to accomplish automatic and real-time mode-matching based on phase-shifted 45° additional force demodulation (45° AFD-RM). The phase-shifted 45° additional force signal has the same frequency as the quadrature force signal, but it is phase-shifted by 45° and applied to the sense mode. In addition, two-way phase-shifted 45° demodulations are used at the sense-mode detection output to obtain a phase metric that is independent of the Coriolis force and can reflect the mode-matching state. Then, this phase metric is used as a control variable to adaptively control the tuning voltage, so as to change the sense-mode frequency through the negative stiffness effect and ultimately achieve real-time mode-matching. Simulation and experimental results show that the proposed 45° AFD-RM method can achieve real-time matching. The mode frequency split is controlled within 0.1 Hz, and the gyroscope scale factor, zero-bias instability, and angle random walk are effectively improved.

show abstract

Stress Effects and Compensation of Bias Drift in a MEMS Vibratory-Rate Gyroscope

Cited by 52 publications

References 21 publications

A Novel High-Sensitivity Butterfly Gyroscope Driven by Horizontal Driving Force

A Novel High-Sensitivity Butterfly Gyroscope Driven by Horizontal Driving Force

A Tuning Fork Gyroscope with a Polygon-Shaped Vibration Beam

MEMS Gyroscope Automatic Real-Time Mode-Matching Method Based on Phase-Shifted 45° Additional Force Demodulation

Contact Info

Product

Resources

About