Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP

Tay, Cho Jui; Quan, Chenggen; Liu, Huicong; Gopal, Mahadevaiah; Ramam, A.

doi:10.1117/1.3421968

Cited by 3 publications

(2 citation statements)

References 25 publications

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“…By varying membrane and suspension dimensions, a range of internal mirror stresses from 0.24 to 0.08 GPa were measured, highlighting the importance of suspension and device design. Based on these studies, they designed four different optimized suspension designs for a suspended Fabry-Perot interferometer filter [13,77].…”

Section: Optomechanical Filtersmentioning

confidence: 99%

Fabrication challenges for indium phosphide microsystems

Siwak

Fan

Ghodssi

2015

J. Micromech. Microeng.

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From the inception of III-V microsystems, monolithically integrated device designs have been the motivating drive for this field, bringing together the utility of single-chip microsystems and conventional fabrication techniques. Indium phosphide (InP) has a particular advantage of having a direct bandgap within the low loss telecommunication wavelength (1550 nm) range, able to support passive waveguiding and optical amplification, detection, and generation depending on the exact alloy of In, P, As, Ga, or Al materials. Utilizing epitaxy, one can envision the growth of a substrate that contains all of the components needed to establish a single-chip optical microsystem, containing detectors, sources, waveguides, and mechanical structures. A monolithic InP MEMS system has, to our knowledge, yet to be realized due to the significant difficulties encountered when fabricating the integrated devices. In this paper we present our own research and consolidate findings from other research groups across the world to give deeper insight into the practical aspects of InP monolithic microsystem development: epitaxial growth of InP-based alloys, etching techniques, common MEMS structures realized in InP, and future applications. We pay special attention to shedding light on considerations that must be taken when designing and fabricating a monolithic InP MEMS device.

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Section: Optomechanical Filtersmentioning

confidence: 99%

Fabrication challenges for indium phosphide microsystems

Siwak

Fan

Ghodssi

2015

J. Micromech. Microeng.

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“…Commonly, this becomes a 1 Author to whom any correspondence should be addressed. more critical problem in a long suspended microstructure with a high lateral aspect ratio [13,14]. For this reason, a single-crystalline silicon or a high-temperature annealed poly-crystalline silicon has been widely used as a basic structural material of the suspended microstructure to avoid the undesirable bending caused by the stress gradient [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

A new approach to control a deflection of an electroplated microstructure: dual current electroplating methods

Yang¹,

Seo²,

Han³

et al. 2013

J. Micromech. Microeng.

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We propose and demonstrate a simple and novel method to control the deflection in a suspended microstructure by using a dual current electroplating (DuCE) method. The key concept of this method is to divide the structure into two layers-a bottom layer and a top layer-and then apply respective current densities in electroplating to those two layers while all other conditions are kept the same. In addition to a flat structure, the direction of structure bending is freely controlled by virtue of the DuCE method. Cantilever Ni beams with a length of 400 μm, which were electroplated by the conventional single current electroplating method, bent downward with a deflection of 3.4 μm. On the contrary, by the DuCE method, cantilever beams with a length of 400 μm showed an almost flat structure as desired. (The current densities of the bottom layer, the top layer, and the ratio of the two current densities, are 0.15, 1.24 A dm -2 , and 8.3, respectively.) Consequently, a nickel electroplated spiral structure with a length of 8600 μm was suspended flat with an end deflection of less than 0.7 μm (the ratio between the deflection and length is 0.007%). This work therefore represents the unprecedented ultra-long suspended microstructure with submicrometer deflection.

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Analysis of the effect of stress-induced waviness in airgap-based optical filters

Ghaderi

Shahmarvandi

Graaf

et al. 2016

Optical Modelling and Design IV

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The preliminary results of a study on the effect of the membrane deformation on the optical response of the distributed Bragg reflector, that is based on a stack of such membranes, are presented. The analysis is applied to airgap-based optical filters, which offer an enhanced refractive index contrast and hence are highly promising for optical MEMS devices. The available methods and materials in MEMS technology would make fabrication of such devices feasible, but the optical requirements impose strict geometrical implications on the membrane structure. Although (an overall) tensile stress in membrane is expected to result in a flat structure after the release, a stress gradient results in a deformed structure. A combined finite element and finite-difference timedomain method has been utilized in this work to study the effects of a stress gradient in a distributed Bragg reflector. The results on the effects of both a linear and a non-linear stress gradient are presented. It is shown that a non-linear stress profile results in twice the deformation and a further reduction of optical performance.

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Stress gradient of a micro-optoelectromechanical systems Fabry–Perot cavity based on InP

Cited by 3 publications

References 25 publications

Fabrication challenges for indium phosphide microsystems

Fabrication challenges for indium phosphide microsystems

A new approach to control a deflection of an electroplated microstructure: dual current electroplating methods

Analysis of the effect of stress-induced waviness in airgap-based optical filters

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