Technical Digest., International Electron Devices Meeting
DOI: 10.1109/iedm.1988.32846
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Stress induced leakage current limiting to scale down EEPROM tunnel oxide thickness

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Cited by 188 publications
(70 citation statements)
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“…3, Tox and Vthi are process-dependent constants. This intrinsic electric field generates stress-induced leakage current (SILC) [17][18], a weak tunneling current that leaks charge away from the FG.…”
Section: Basics Of Nand Flash Memorymentioning
confidence: 99%
“…3, Tox and Vthi are process-dependent constants. This intrinsic electric field generates stress-induced leakage current (SILC) [17][18], a weak tunneling current that leaks charge away from the FG.…”
Section: Basics Of Nand Flash Memorymentioning
confidence: 99%
“…However, the oxide thickness has barely scaled over the many Flash technology generations, remaining far away from its theoretical limit, because it was soon realized [70,166,167] that repeated P/E cycles led to degradation of the tunnel oxide characteristics, enhanced leakage and worse retention. The enhanced oxide leakage at low fields after electrical stress is known as stress-induced leakage current, or SILC [168,169]. SILC has been largely studied on capacitors and described in terms of a trap-assisted tunneling (TAT) process through oxide traps [170][171][172][173][174][175][176][177][178][179] (see Figure 17a for a pictorial view of the process), in agreement with experimental evidence [180,181].…”
Section: Retention After Cycling and Silcmentioning
confidence: 53%
“…Data retention characteristics are determined by two mechanisms: stress-induced leakage currents (SILCs) [1][2][3][4][5] and the release of electrons trapped inside the tunnel oxide (detrapping) [6,7]. By using a tunnel oxide >8 nm, we can avoid SILCs.…”
Section: Introductionmentioning
confidence: 99%