2008
DOI: 10.1016/j.tsf.2008.04.096
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Stress, texture and microstructure of zirconium thin films probed by X-ray diffraction

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Cited by 24 publications
(16 citation statements)
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“…The diffraction peaks are wide, which is associated with a small crystallite size (grain fineness), and large microstrain due to the presence of structural defects. An anisotropic shape is observed that can be caused by stress, this also indicates that the crystallites have an anisotropy shape [18].…”
Section: Xrd Analysismentioning
confidence: 78%
“…The diffraction peaks are wide, which is associated with a small crystallite size (grain fineness), and large microstrain due to the presence of structural defects. An anisotropic shape is observed that can be caused by stress, this also indicates that the crystallites have an anisotropy shape [18].…”
Section: Xrd Analysismentioning
confidence: 78%
“…It is known that thin films can withstand very large amount of stresses (~ a few GPa). Fig.2 (b) & (c) show thickness dependent stresses in Zr and Ti thin films respectively [8,4]. Ti thin films undergoes hcp to fcc phase transformation (as film deposition time decreases) and the stress values in both the phases are shown in Fig.…”
Section: Thickness Dependence: Polycrystalline Thin Filmsmentioning
confidence: 97%
“…Fig. 1(a) shows the change of crystallite size with film thickness reduction in Zr thin films [8]. Film thickness/crystallite size reduction further leads to change in the ratios of 'strain free' lattice parameters (c o /a o ) of Zr thin films [ Fig.…”
Section: Thickness Dependence: Polycrystalline Thin Filmsmentioning
confidence: 99%
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