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AbstractZirconium thin films were grown on high carbon steel substrates EN C100 (1 %wt. of carbon) by RF magnetron sputtering. In order to study the reactivity of the film/substrate system as a function of the temperature, one hour vacuum annealing was carried out for different temperatures between 600°C and 1100°C. The films were then analyzed by X-ray diffraction, scanning electron microscopy, glow discharge optical emission spectroscopy (GDOES) and nanoindentation.The obtained results showed a progressive transformation of zirconium film to zirconium carbide.Carbon atoms diffusion from substrate toward the film induced this transformation. The sample annealed at 900°C exhibited the best mechanicals properties (H =17 GPa and E = 220 GPa).Samples treated at higher temperature were affected by oxidation and high microporosity. Even if the conversion is uncomplete, annealing significantly promotes adhesion of the film on the substrate.