Stretchable Parylene-C electrodes enabled by serpentine structures on arbitrary elastomers by silicone rubber adhesive

Ji, Bowen; Xie, Zhaoqian; Hong, Wen; Jiang, Chunpeng; Guo, Zhejun; Wang, Longchun; Wang, Xiaolin; Liu, Jingquan

doi:10.1016/j.jmat.2019.11.006

Cited by 43 publications

(39 citation statements)

References 41 publications

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“…To improve this, we fabricated flexible S-shaped electrodes with 1.0 mm radius curvature using an inkjet printer and performed similar bending durability tests. In general, S-shaped patterns are known to be stronger than linear patterns under tensile stress [ 27 , 28 , 29 , 30 , 31 , 32 ]. As shown in Figure 8 , the flexible S-shaped electrode showed a consistent bending durability even after 200,000 bending cycles.…”

Section: Resultsmentioning

confidence: 99%

Effects of Curing Temperature on Bending Durability of Inkjet-Printed Flexible Silver Electrode

et al. 2020

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Flexible electrodes should have a good mechanical durability and electrical properties under even extreme bending and deformation conditions. We fabricated such an electrode using an inkjet printing system. In addition, annealing was performed under curing temperatures of 150, 170, and 190 °C to improve the electrical resistance performance of the electrode. Scanning electron microscopy, X-ray diffraction, nanoindentation, and surface profile measurements were performed to measure and analyze the electrode characteristics and the change in the shape of the coffee ring. The bending deformation behavior of the electrode was predicted by simulations. To confirm the bending durability of the flexible electrode according to different curing temperatures, the bending deformation and electrical resistance were simultaneously tested. It was found that the electrode cured at a temperature of 170 °C could endure 20,185 bending cycles and had the best durability, which was consistent with the predicted simulation results. Moreover, the average specific resistance before the electrode was disconnected was 13.45 μΩ cm, which is similar to the conventional electrode value. These results are expected to increase the durability and life of flexible electrodes, which can be used in flexible electronic devices, sensors, and wearable devices that are subjected to significant bending deformation.

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Section: Resultsmentioning

confidence: 99%

Effects of Curing Temperature on Bending Durability of Inkjet-Printed Flexible Silver Electrode

et al. 2020

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“…Figure 2 shows some recent works of planar layout, which can be divided into flexible and soft structures according to the different substrate materials. [68]); (b) a parylene-based planar array with 56 microelectrodes and 6 macrodots (reprinted with permission from [84]); (c) an Au NN-based transparent ECoG monitoring system proposed as implantable planar neural electrodes; i: scale bar, 5 µm; ii: scale bar, 500 µm (reprinted with permission from [85]); (d) a flexible planar microelectrode device which could be inserted through a small cranial suture (reprinted with permission from [56]); (e) a soft, high-density and stretchable electrode grid (SEG) based on an inert, high-performance composite material; scale bar, 500 µm (reprinted with permission from [72]); (f) a PDMS-based soft, stretchable, 16-channel planar ECoG array (reprinted with permission from [86]); (g) the serpentine conductive leads embedded in polymer films attached on any soft planar substrate as the stretchable planar ECoG electrodes (reprinted with permission from [87]).…”

Section: Design 21 Planar Layoutmentioning

confidence: 99%

“…The electrode site was designed as a ring with an inner diameter of 200 µm and outer diameter of 400 µm with optical transparence, to be compatible with wide-field and 2-photon calcium imaging. Another way to balance the stretchability and traditional fabrication processes is the structure design, such as the serpentine conductive leads embedded in polymer films attached to the soft elastic substrate (Figure 2g) [87]. To improve the adhesion strength, a layer of titanium/silicon dioxide (5/50 nm) was deposited on the back of serpentine structures.…”

Section: Soft Planar Structurementioning

confidence: 99%

Implantable Thin Film Devices as Brain-Computer Interfaces: Recent Advances in Design and Fabrication Approaches

Zhou

Wang

et al. 2021

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Remarkable progress has been made in the high resolution, biocompatibility, durability and stretchability for the implantable brain-computer interface (BCI) in the last decades. Due to the inevitable damage of brain tissue caused by traditional rigid devices, the thin film devices are developing rapidly and attracting considerable attention, with continuous progress in flexible materials and non-silicon micro/nano fabrication methods. Therefore, it is necessary to systematically summarize the recent development of implantable thin film devices for acquiring brain information. This brief review subdivides the flexible thin film devices into the following four categories: planar, open-mesh, probe, and micro-wire layouts. In addition, an overview of the fabrication approaches is also presented. Traditional lithography and state-of-the-art processing methods are discussed for the key issue of high-resolution. Special substrates and interconnects are also highlighted with varied materials and fabrication routines. In conclusion, a discussion of the remaining obstacles and directions for future research is provided.

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“…Ji et al demonstrated serpentine‐shaped gold (thickness 300 nm) microelectrodes based on Ecoflex substrate (50 μm) (Figure 2b,c). [ 80 ] The impedance values at 1 kHz remain almost unchanged after 5000 repetitive stretching cycles with 50% strain (61.7 ± 14.8 kΩ vs. 65.5 ± 18.7 kΩ).…”

Section: Materials and Devices For Electrical Biointerfacingmentioning

confidence: 99%

“…b,c) Reproduced with permission. [ 80 ] Copyright 2020, Elsevier. d) Schematic drawing of different prestretched structures and the analysis of the relevant strain distribution: wrinkled structure (up), suspending structure (middle), and tripod PDMS bending structure (down).…”

Section: Materials and Devices For Electrical Biointerfacingmentioning

confidence: 99%

Advanced Electrical and Optical Microsystems for Biointerfacing

Obaid

Chen

2020

Advanced Intelligent Systems

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Electrical and optical biointerfaces have contributed considerably to understanding biological systems. Recent advances in biocompatible materials, structure designs, and fabrication techniques have established flexible and minimally invasive electronic/optoelectronic platforms that laminate onto targeted surface regions or implant into precise locations of biosystems to monitor and control various biological processes at cell, tissue, and organ levels. Herein, recent progress in advanced biointegrated electrical and optical platforms is discussed. An overview of materials and device designs to form flexible and even stretchable electrodes is presented. Strategies to reduce tissue damage and foreign‐body response to improve chronic stability are described. State‐of‐the‐art wearable and implantable microsystems with/without wireless capabilities for bioelectrical sensing and stimulation, optical recording and modulation, and multimodal operation are highlighted. In conclusion, a discussion of the remaining obstacles for future research in these areas is provided.

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Stretchable Parylene-C electrodes enabled by serpentine structures on arbitrary elastomers by silicone rubber adhesive

Cited by 43 publications

References 41 publications

Effects of Curing Temperature on Bending Durability of Inkjet-Printed Flexible Silver Electrode

Effects of Curing Temperature on Bending Durability of Inkjet-Printed Flexible Silver Electrode

Implantable Thin Film Devices as Brain-Computer Interfaces: Recent Advances in Design and Fabrication Approaches

Advanced Electrical and Optical Microsystems for Biointerfacing

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