Stroboscopic interferometer

Harris, James S.; Fusek, Richard L.; Marcheski, Joe

doi:10.1364/ao.18.002368

Cited by 10 publications

(3 citation statements)

References 1 publication

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“…Therefore, measuring vibrating samples is similar to measuring static ones. The stroboscopic interferometer was introduced in 1979 for the measurement of objects in the presence of severe acoustic noise and vibration effects [1]. An argon ion laser source was employed in a Fizeau interferometer structure and this technique was proven to be effective in eliminating undesired vibration effects.…”

Section: Introductionmentioning

confidence: 99%

Theoretical simulation and experimental confirmation of duty cycle effect on stroboscopic white light interferometry for M(O)EMS dynamic characterization

Chen

Tapilouw

2013

J. Micromech. Microeng.

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Stroboscopic white light interferometry (SWLI) has been known as a useful measurement technique for vibrating samples such as micro-electro-mechanical systems (MEMS) or micro-opto-electro-mechanical systems (M(O)EMS) because it enables dynamic mode reconstruction and characterization of the tested system. An approximate model simulation without any experimental confirmation previously indicated that the duty cycle of the light could reduce the accuracy of the measurement. To provide a comprehensive insight into this important phenomenon, the study investigated theoretically and experimentally the effect of duty cycle of the light. An atomic force microscopy cantilever beam vibrating at its second resonant frequency was measured and the experimental measurements were analyzed and compared with the simulated results. In general, a reasonable correspondence between the mathematical model and the experimental measurements has been observed when the duty cycle is less than 15% and the average deviation is kept within 15.4% of the vibration amplitude. However, it is verified that the SWLI using white light LED has its physical detection limits when the cycle time of the strobed light or the light exposure time of the imaging device is more than 20%, in which the maximum measured error can significantly exceed 38.4% of the vibration amplitude.

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Section: Introductionmentioning

confidence: 99%

Theoretical simulation and experimental confirmation of duty cycle effect on stroboscopic white light interferometry for M(O)EMS dynamic characterization

Chen

Tapilouw

2013

J. Micromech. Microeng.

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“…Recording the complete evolution is possible for repetitive transient phenomena by varying the delay between the laser pulse and the triggered phenomenon. Depending on the time scale of the phenomenon under study, pulsed light sources such as pulsed LED [9,10], Q-switched lasers [11,12], or even femtosecond laser [13][14][15][16] have been used.…”

Section: Introductionmentioning

confidence: 99%

Time-resolved quantitative multiphase interferometric imaging of a highly focused ultrasound pulse

et al. 2010

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International audienceInterferometric imaging is a well established method to image phase objects by mixing the image wavefront with a reference one on a CCD camera. It has also been applied to fast transient phenomena, mostly through the analysis of single interferograms. It is shown that for repetitive phenomena multiphase acquisition brings significant advantages. A 1 MHz focused sound field emitted by a hemispherical piezotransducer in water is imaged as an example. Quantitative image analysis provides high resolution sound field profiles. Pressure at focus determined by this method agrees with measurements from a fiber-optic probe hydrophone. This confirms that multiphase interferometric imaging can indeed provide quantitative measurements

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“…Strobed holographic interferometry has been employed for more than 25 years to characterize a variety of vibrating structures. 1 Only recently, however, has strobed illumination been combined with more sophisticated interferometric techniques to produce quantitative data for a large class of moving devices.…”

Section: Introductionmentioning

confidence: 99%

Dynamic MEMS measurement using a strobed interferometric system with combined coherence sensing and phase information

Novak

Wan

Unruh

et al.

Proceedings International Conference on MEMS, NANO and Smart Systems

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Stroboscopic interferometer

Cited by 10 publications

References 1 publication

Theoretical simulation and experimental confirmation of duty cycle effect on stroboscopic white light interferometry for M(O)EMS dynamic characterization

Theoretical simulation and experimental confirmation of duty cycle effect on stroboscopic white light interferometry for M(O)EMS dynamic characterization

Time-resolved quantitative multiphase interferometric imaging of a highly focused ultrasound pulse

Dynamic MEMS measurement using a strobed interferometric system with combined coherence sensing and phase information

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