We have fabricated hexagonal pillar like GaN nanostructures on Si (111) substrate. The GaN nanopillars were grown by two step processes, including droplet epitaxy to form GaN nanodots as buffer, and hot wall epitaxy to grow GaN nanopillars. We proposed the growth mechanism of the GaN nanodot by droplet epitaxy. Density of the GaN nanopillars was controlled by changing the density of GaN nanodots. When the nanopillar density was so high as to coalesce with each other, the luminescence efficiency reduced. The deterioration of luminescence is considered to be due to increase of dislocations arising at the nanopillars interface. To obtain the high luminescence efficiency, it is important to increase density of nanopillars with no coalescing. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)