Structural and dimensional control in micromachined integrated solid state gas sensors

Rickerby, D. G.; Wächter, Norbert; Horrillo, M.C.; Gutiérrez, J.; Gràcia, I.; Cané, C.

doi:10.1016/s0925-4005(00)00479-2

Cited by 33 publications

(5 citation statements)

References 18 publications

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“…Sensor substrates consisted of an integrated array of four inert micro-hotplate substrates, each one comprising a polysilicon heating resistor sandwiched between two thin silicon nitride layers and a pair of interdigitated Pt electrodes on top (the electrode gap was 50 µm). The membrane thickness was about 0.6 µm and the active (hot) area of 500 µm×500 µm [20]. Plasma-treated Rh-decorated MWCNT were dispersed in dimethyl formamide (DMF) by ultrasonication at room temperature to form uniform suspensions.…”

Section: Sensor Fabrication and Characterizationmentioning

confidence: 99%

Gas sensing properties of multiwall carbon nanotubes decorated with rhodium nanoparticles

Leghrib

Dufour

Demoisson

et al. 2011

Sensors and Actuators B: Chemical

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International audienceIn the present work, multiwalled carbon nanotubes were decorated with rhodium nanoparticles using a colloidal solution in the post-discharge of an RF atmospheric plasma of argon (Ar) or argon/oxygen (Ar:O 2). The properties of these hybrid materials towards the room temperature detection of NO 2 , C 2 H 4 , CO, C 6 H 6 and moisture were investigated and discussed in view of compositional and morphological studies. It was found that the presence of oxygen in the plasma treatment is essential to significantly enhance the gas response of Rh-decorated multiwalled carbon nanotubes and to avoid response saturation even at low gas/vapor concentrations. These desirable effects are attributed to the presence of oxygen during the CNT plasma treatment since oxygenated vacancies act both as active adsorption sites for gases and as anchoring sites for Rh nanoparticles (the presence of Rh nanoclusters is nearly doubled in Ar:O 2 treated samples as compared to Ar treated samples). The oxygen treatment also makes easier the charge transfer between Rh nanoparticles and carbon nanotubes upon gas adsorption. The method for treating and decorating multiwalled carbon nanotubes used here is simple, fast and scalable for producing gas sensitive nanohybrid materials with uniform and well-controlled properties

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Section: Sensor Fabrication and Characterizationmentioning

confidence: 99%

Gas sensing properties of multiwall carbon nanotubes decorated with rhodium nanoparticles

Leghrib

Dufour

Demoisson

et al. 2011

Sensors and Actuators B: Chemical

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“…Silicon-based micro-hotplate sensor substrates (CNM, Barcelona) [40] have been used to test the gas sensing properties of the Au-decorated MWCNTs. The deposition of the sensing material was performed by the drop coating method using a microinjector (JBE1113 Dispenser, I&J FISNAR Inc., USA).…”

Section: Fabrication Of Gas Sensors Based On Nanotubes Decorated With...mentioning

confidence: 99%

Carbon nanotubes randomly decorated with gold clusters: from nano²hybrid atomic structures to gas sensing prototypes

et al. 2009

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Carbon nanotube surfaces, activated and randomly decorated with metal nanoclusters, have been studied in uniquely combined theoretical and experimental approaches as prototypes for molecular recognition. The key concept is to shape metallic clusters that donate or accept a fractional charge upon adsorption of a target molecule, and modify the electron transport in the nanotube. The present work focuses on a simple system, carbon nanotubes with gold clusters. The nature of the gold-nanotube interaction is studied using first-principles techniques. The numerical simulations predict the binding and diffusion energies of gold atoms at the tube surface, including realistic atomic models for defects potentially present at the nanotube surface. The atomic structure of the gold nanoclusters and their effect on the intrinsic electronic quantum transport properties of the nanotube are also predicted. Experimentally, multi-wall CNTs are decorated with gold clusters using (1) vacuum evaporation, after activation with an RF oxygen plasma and (2) colloid solution injected into an RF atmospheric plasma; the hybrid systems are accurately characterized using XPS and TEM techniques. The response of gas sensors based on these nano(2)hybrids is quantified for the detection of toxic species like NO(2), CO, C(2)H(5)OH and C(2)H(4).

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“…The experimental data shown in Table 6.1 are the results of laboratory tests for the detection of low concentrations of nitrogen dioxide in pure air using sensor elements with tin oxide layers of different thicknesses [94]. The experimental data shown in Table 6.1 are the results of laboratory tests for the detection of low concentrations of nitrogen dioxide in pure air using sensor elements with tin oxide layers of different thicknesses [94].…”

Section: Integrated Solid-state Sensorsmentioning

confidence: 99%

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

Rickerby

Serventi

2010

Environanotechnology

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Structural and dimensional control in micromachined integrated solid state gas sensors

Cited by 33 publications

References 18 publications

Gas sensing properties of multiwall carbon nanotubes decorated with rhodium nanoparticles

Gas sensing properties of multiwall carbon nanotubes decorated with rhodium nanoparticles

Carbon nanotubes randomly decorated with gold clusters: from nano²hybrid atomic structures to gas sensing prototypes

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

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Structural and dimensional control in micromachined integrated solid state gas sensors

Cited by 33 publications

References 18 publications

Gas sensing properties of multiwall carbon nanotubes decorated with rhodium nanoparticles

Gas sensing properties of multiwall carbon nanotubes decorated with rhodium nanoparticles

Carbon nanotubes randomly decorated with gold clusters: from nano2hybrid atomic structures to gas sensing prototypes

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

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Product

Resources

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Carbon nanotubes randomly decorated with gold clusters: from nano²hybrid atomic structures to gas sensing prototypes