2002
DOI: 10.1016/s0921-4534(02)00718-9
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Structural and electrical characterisation of Mo films for transition-edge sensors

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Cited by 6 publications
(8 citation statements)
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“…The average critical temperature of Mo films with thickness dMo>35-40 nm grown in parallel to the bilayers analysed is Tco=999±11 mK; for thinner films finite thickness effects are observed [7]. This value is in good agreement with previous results of Tco for bare sputtered Mo films, full within the range of critical temperatures reported for Mo thin films [6,7,16,17,18] but somehow above the critical temperature of bulk Mo, 915 mK.…”
Section: Resultssupporting
confidence: 90%
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“…The average critical temperature of Mo films with thickness dMo>35-40 nm grown in parallel to the bilayers analysed is Tco=999±11 mK; for thinner films finite thickness effects are observed [7]. This value is in good agreement with previous results of Tco for bare sputtered Mo films, full within the range of critical temperatures reported for Mo thin films [6,7,16,17,18] but somehow above the critical temperature of bulk Mo, 915 mK.…”
Section: Resultssupporting
confidence: 90%
“…This gives further coherence to the analyses and fits. The t values obtained are similar to those reported for Mo-based bilayers that constitute TESs with excellent performances [16,17,18,20,21].…”
Section: Resultssupporting
confidence: 85%
“…These values are very much similar to those usually found for Mo thin films deposited by sputtering and e-beam but are substantially lower than those of high-purity Mo single crystals. The high ρ n and low RRR values of granular metal thin films are usually ascribed to enhanced scattering occurring at grain boundaries [2], [3], [18], [29], [30]. This fact is further analyzed in the succeeding paragraphs.…”
Section: B Normal-state Resistivitymentioning
confidence: 99%
“…Several reports have emphasized the relationship between T c and stress in Mo films. For films deposited by e-beam, T c and RRR rise as tensile stress is suppressed [5], [15]- [18]. A few reports focused on dc magnetron-sputtered films report that the best T c (∼1-1.4 K) and reproducibility are obtained for slightly compressed films (σ ∼ −100 MPa) [6], [17].…”
Section: Superconducting Critical Temperaturementioning
confidence: 99%
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