2020
DOI: 10.1016/j.matpr.2020.03.721
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Structural and electrical properties of Mg Silicide thin films deposited by RF sputtering

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“…The spectra are free from contaminants except for weak oxidation and weak adventitious carbon. They are consistent with past published XPS data on Mg 2 Si 12 and 4H‐SiC 13 …”
Section: Resultssupporting
confidence: 93%
“…The spectra are free from contaminants except for weak oxidation and weak adventitious carbon. They are consistent with past published XPS data on Mg 2 Si 12 and 4H‐SiC 13 …”
Section: Resultssupporting
confidence: 93%