Thermally-activated phase transitions in Pt/Mn/Fe thin films were investigated by a combination of x-ray diffraction, transmission electron microscopy, secondary neutral mass spectrometry depth profiling, atomic force microscopy, and magnetic properties measurements. Postannealing was carried out in vacuum to different temperatures up to 620 °C. Initially, at temperatures between 280 °C -450 °C first L10-MnPt is formed at the Mn/Pt interface followed by the most likely formation of metastable bcc Fe3Pt, which gets transformed by further annealing to fcc Fe3Pt and eventually to chemically ordered L12-Fe3Pt. The final product after annealing at 620 °C consists of two interesting phases, which are relevant for spintronic applications, antiferromagnetic L10-MnPt with addition of Fe and ferromagnetic L12-Fe3Pt, consistent with the initial element composition.