In this work, we studied atomic self-diffusion and structural phase transformation in a single phase iron mononitride (FeN) thin film deposited at an optimized substrate temperature (T s ) of 423 K. At this T s , FeN film exhibit a tetrahedral coordination between Fe and N atoms (ZnS-type structure with lattice parameter of 4.28Å). The structure of FeN film was studied by combining x-ray diffraction with Fe and N K-edge x-ray absorption spectroscopy and conversion electron Mössbauer spectroscopy measurements. Selfdiffusion of Fe and N was measured using secondary ion mass spectroscopy depth profiling in trilayer structures: [FeN(50 nm)/ 57 FeN(2 nm)/FeN(50 nm)] and [FeN(50 nm)/Fe 15 N(2 nm)/FeN(50 nm)] deposited on an amorphous quartz substrate using reactive magnetron sputtering. It was found that atomic self-diffusion is strongly associated with the thermal stability. Before reaching the phase decomposition temperature, the self-diffusion of N was found to be slower than Fe. Upon phase decomposition, both Fe and N diffuse rapidly, and at this stage, the self-diffusion of N takes over Fe. Within the thermally stable state, slower N diffusion indicates that Fe-N bonds are stronger than Fe-Fe bonds in FeN. This behavior was predicted theoretically and has been evidenced in this work.