Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering

Yang, Ping-Feng; Jian, Sheng-Rui; Wu, Sean; Lai, Yi‐Shao; Wang, Chung-Ting; Chen, Rongsheng

doi:10.1016/j.apsusc.2009.01.051

Cited by 9 publications

(3 citation statements)

References 23 publications

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“…Furthermore, for this type of film, the hardness values (26.4 ± 0.8 GPa) are higher than those reported in literature for bulk AlN ceramics (9.9–12 GPa) [ 91 ]. The AlN film with the lowest crystallinity status and c -axis texturing (i.e., S1) elicited elastic modulus (270.6 ± 10.6 GPa) and hardness (21.9 ± 0.54 GPa) values similar to the ones obtained by Yang et al [ 50 ] (E ≈ 242 GPa and H ≈ 19 GPa) for an AlN sputtered film with similar structural properties.…”

Section: Resultssupporting

confidence: 79%

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Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

et al. 2017

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Aluminum Nitride (AlN) has been long time being regarded as highly interesting material for developing sensing applications (including biosensors and implantable sensors). AlN, due to its appealing electronic properties, is envisaged lately to serve as a multi-functional biosensing platform. Although generally exploited for its intrinsic piezoelectricity, its surface morphology and mechanical performance (elastic modulus, hardness, wear, scratch and tensile resistance to delamination, adherence to the substrate), corrosion resistance and cytocompatibility are also essential features for high performance sustainable biosensor devices. However, information about AlN suitability for such applications is rather scarce or at best scattered and incomplete. Here, we aim to deliver a comprehensive evaluation of the morpho-structural, compositional, mechanical, electrochemical and biological properties of reactive radio-frequency magnetron sputtered AlN nanostructured thin films with various degrees of c-axis texturing, deposited at a low temperature (~50 °C) on Si (100) substrates. The inter-conditionality elicited between the base pressure level attained in the reactor chamber and crystalline quality of AlN films is highlighted. The potential suitability of nanostructured AlN (in form of thin films) for the realization of various type of sensors (with emphasis on bio-sensors) is thoroughly probed, thus unveiling its advantages and limitations, as well as suggesting paths to safely exploit the remarkable prospects of this type of materials.

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Section: Resultssupporting

confidence: 79%

“…Also, in order to fully exploit the great potential of AlN films for biomedical applications, cytocompatibility and corrosion resistance have to be explored. To date, there are only scarce and incomplete assessments of the mechanical [ 50 ], corrosion [ 51 ] and cytocompatibility [ 34 , 52 , 53 ] of AlN sputtered thin films.…”

Section: Introductionmentioning

confidence: 99%

Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

et al. 2017

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“…The elastic modulus can be extracted from the resonance frequency of cantilever beams that are fabricated out of the thin film of interest [20]- [23], but this technique requires multiple film deposition, etching, and lithography procedures and optimization thereof. In contrast, instrumented indentation presents a nearly preparation-free testing method for thin films deposited on a substrate [18], [24]- [27], making it more suitable for rapid evaluation of elastic modulus in films fabricated via combinatorial deposition in order to cover a large composition range over a single sample library. However, 0885-3010 © 2018 IEEE.…”

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confidence: 99%

Characterization of Elastic Modulus Across the (Al_{1–<italic>x</italic>}Sc_{<italic>x</italic>})N System Using DFT and Substrate-Effect-Corrected Nanoindentation

Chen

Manna

et al. 2018

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Knowledge of accurate values of elastic modulus of (AlSc)N is required for design of piezoelectric resonators and related devices. Thin films of (AlSc)N across the entire composition space are deposited and characterized. Accuracy of modulus measurements is improved and quantified by removing the influence of substrate effects and by direct comparison of experimental results with density functional theory calculations. The 5%-30% Sc compositional range is of particular interest for piezoelectric applications and is covered at higher compositional resolution here than in previous work. The reduced elastic modulus is found to decrease by as much as 40% with increasing Sc concentration in the wurtzite phase according to both experimental and computational techniques, whereas Sc-rich rocksalt-structured films exhibit little variation in modulus with composition.

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Scratch-resistant antireflective coating for mid-wave infrared band

Zhu

Wang

Pan

et al. 2023

Infrared Physics & Technology

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Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering

Cited by 9 publications

References 23 publications

Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

Characterization of Elastic Modulus Across the (Al_{1–<italic>x</italic>}Sc_{<italic>x</italic>})N System Using DFT and Substrate-Effect-Corrected Nanoindentation

Scratch-resistant antireflective coating for mid-wave infrared band

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Structural and mechanical characteristics of (103) AlN thin films prepared by radio frequency magnetron sputtering

Cited by 9 publications

References 23 publications

Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure

Characterization of Elastic Modulus Across the (Al1–<italic>x</italic>Sc<italic>x</italic>)N System Using DFT and Substrate-Effect-Corrected Nanoindentation

Scratch-resistant antireflective coating for mid-wave infrared band

Contact Info

Product

Resources

About

Characterization of Elastic Modulus Across the (Al_{1–<italic>x</italic>}Sc_{<italic>x</italic>})N System Using DFT and Substrate-Effect-Corrected Nanoindentation