Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Hirata, Yuki; Takeuchi, Ryotaro; Taniguchi, Hiroyuki; Kawagoe, Masao; Iwamoto, Y.; Yoshizato, Mikito; Akasaka, Hiroki; Ohtake, Naoto

doi:10.3390/ma14040719

Cited by 7 publications

(5 citation statements)

References 63 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It should be emphasized that these hardness values are higher than that of polycrystalline h-BN powder (H = 0.05-0.6 GPa) [103]. A significant decrease in the values of H and E compared to LPCVD films is associated with the dominance of "softer" sp 2 B-N and sp 2 B-C-N bonds and a smaller number of B-C bonds [3,104,105]. The presence of hydrogen-and oxygen-containing bonds also contributed to the decrease in values of mechanical performances [52].…”

Section: Mechanical Propertiesmentioning

confidence: 95%

Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization

et al. 2023

View full text Add to dashboard Cite

This study reports the chemical vapor deposition of amorphous boron carbonitride films on Si(100) and SiO2 substrates using a trimethylamine borane and nitrogen mixture. BCxNy films with different compositions were produced via variations in substrate temperature and type of gas-phase activation. The low-pressure chemical vapor deposition (LPCVD) and plasma-enhanced chemical vapor deposition (PECVD) methods were used. The “elemental composition—chemical bonding state—properties” relationship of synthesized BCxNy was systematically studied. The hydrophilicity, mechanical, and optical properties of the films are discussed in detail. The composition of films deposited by the LPCVD method at temperatures ranging from 673 to 973 K was close to that of boron carbide with a low nitrogen content (BCxNy). The refractive index of these films changed in the range from 2.43 to 2.56 and increased with temperature. The transparency of these films achieved 85%. LPCVD films were hydrophilic and the water contact angles varied between 53 and 63°; the surface free energy was 42–48 mN/m. The microhardness, Young’s modulus and elastic recovery of LPCVD films ranged within 24–28 GPa, 220–247 GPa, and 70–74%, respectively. The structure of the PECVD films was close to that of hexagonal boron nitride, and their composition can be described by the BCxNyOz:H formula. In case of the PECVD process, the smooth films were only produced at low deposition temperatures (373–523 K). The refractive index of these films ranged from 1.51 to 1.67. The transparency of these films achieved 95%; the optical band gap was evaluated as 4.92–5.28 eV. Unlike LPCVD films, they were very soft, and their microhardness, Young’s modulus and elastic recovery were 0.8–1.4 GPa, 25–26 GPa, and 19–28%, respectively. A set of optimized process parameters to fabricate LPCVD BCxNy films with improved mechanical and PECVD films with high transparency is suggested.

show abstract

Section: Mechanical Propertiesmentioning

confidence: 95%

Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization

et al. 2023

View full text Add to dashboard Cite

show abstract

“…Panjan et al [50] revealed that post-polishing procedures for cathodic arc-deposited TiN coatings could improve the wear resistance and shorten the running-in duration. Another interesting fabrication method is the combined vacuum arc and magnetron sputtering hybrid process described by Hirata et al [51], as shown in Figure 3d, for creating amorphous boron carbon nitride (a-BCN) films for tribological applications. Here, the BN target is mounted on the RFMS, while the graphite target is positioned on the cathodic arc gun to deposit the films.…”

Section: Fabrication Methodsmentioning

confidence: 99%

“…Moreover, the diagonal placement of the arc gun in relation to the substrate allows for better control of droplet deposition in the coatings, a common problem associated with conventional vacuum arc processes. [45], (b) ultra-short PLD [46], (c) FCVA [49], and (d) arc-sputtering hybrid method [51]. (Reproduced with permission.…”

Section: Fabrication Methodsmentioning

confidence: 99%

State-of-the-Art Developments in Advanced Hard Ceramic Coatings Using PVD Techniques for High-Temperature Tribological Applications

2023

View full text Add to dashboard Cite

Hard and wear-resistant coatings created utilizing physical vapor deposition (PVD) techniques are extensively used in extreme tribological applications. The friction and wear behavior of coatings vary significantly with temperature, indicating that advanced coating concepts are essential for prolonged load-bearing applications. Many coating concepts have recently been explored in this area, including multicomponent, multilayer, gradient coatings; high entropy alloy (HEA) nitride; and functionally modified coatings. In this review, we highlighted the most significant findings from ongoing research to comprehend crucial coating properties and design aspects. To obtain enhanced tribological properties, the microstructure, composition, residual stress, hardness, and HT oxidation resistance are tuned through doping or addition of appropriate materials at an optimized level into the primary coatings. Such improvements are achieved by optimizing PVD process parameters such as input power, partial pressure, reactive gas flow rates, substrate bias, and temperature. The incorporation of ideal amounts of Si, Cr, Mo, W, Ag, and Cu into ternary and quaternary coatings, as well as unique multilayer designs, considerably increases the tribological performance of the coatings. Recent discoveries show that not only mechanical hardness and fracture toughness govern wear resistance, but also that oxidation at HT plays a significant role in the lubrication or wear failure of coatings. The tribo-induced metal oxides and/or Magnéli phases concentrated in the tribolayer are the key governing factors of friction and wear behavior at high temperatures. This review includes detailed insights into the advancements in wear resistance as well as various failure mechanisms associated with temperature changes.

show abstract

“…C film and a wear resistance superior to that of the a-C film (Hirata, et al, 2021). Diamondlike carbon-silver composite films possess sufficient hardness and Young's modulus values.…”

Section: Introductionmentioning

confidence: 94%

Evaluation of mechanical and antibacterial properties of Cu-DLC composite films

LI,

KOGA,

HIRATA

et al. 2023

Mechanical Engineering Journal

Self Cite

View full text Add to dashboard Cite

Diamond-like carbon (DLC) films had been formed as a surface treatment for intracorporal device for decreasing the coefficient of friction. DLC film showed significant stability without being damaged during acid immersion and high-pressure steam sterilization. However, bacteria that adhere to medical devices lead to the induction of infectious diseases associated with therapeutic actions. Therefore, maintenance of a hygienic surface condition has been strictly required. This study demonstrated the fabrication of DLC films (gas source: CH 4 ), which incorporated Cu (Cu-DLC). The Cu-DLC films were synthesized on a Si (100) substrate via plasma-enhanced chemical vapor deposition and magnetron sputtering. The surface morphology, microstructure, element contents, wear resistance, hardness, and antibacterial properties of the films were experimentally analyzed. Cu particles were considered not uniformly distributed in the DLC film, they embedded in DLC films formed a three-dimensional structure led to higher roughness. The Cu-DLC exhibited wear resistance and higher hardness compared to Cu. After inoculation, Cu-DLC films showed higher antibacterial activity against E. coli than pure DLC. It is expected that the hygienic films with excellent mechanical properties demonstrated in the present study will be utilized in various medical and industrial sectors.

show abstract

Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Cited by 7 publications

References 63 publications

Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization

Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization

State-of-the-Art Developments in Advanced Hard Ceramic Coatings Using PVD Techniques for High-Temperature Tribological Applications

Evaluation of mechanical and antibacterial properties of Cu-DLC composite films

Contact Info

Product

Resources

About