Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD

Chouquet, C.; Gerbaud, Guillaume; Bardet, Michel; Barrat, S.; Billard, Alain; Sanchette, Frédéric; Ducros, C.

doi:10.1016/j.surfcoat.2009.09.016

Cited by 47 publications

(23 citation statements)

References 22 publications

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“…27 at.%. It is worth noting that the addition of N and Si atoms to the diamond-like carbon structure caused a decrease in the value of internal stresses inside the obtained coatings as well as their hardness, which was also observed in other works [29][30][31]. However, the presence of silicon above (ca.…”

Section: Morphological Analysissupporting

confidence: 76%

Physicochemical and Biological Activity Analysis of Low-Density Polyethylene Substrate Modified by Multi-Layer Coatings Based on DLC Structures, Obtained Using RF CVD Method

et al. 2018

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In this paper, the surface properties and selected mechanical and biological properties of various multi-layer systems based on diamond-like carbon structure deposited on low-density polyethylene (LDPE) substrate were studied. Plasma etching and layers deposition (incl. DLC, N-DLC, Si-DLC) were carried out using the RF CVD (radio frequency chemical vapor deposition) method. In particular, polyethylene with deposited N-DLC and DLC layers in one process was characterized by a surface hardness ca. seven times (up to ca. 2.3 GPa) higher than the unmodified substrate. Additionally, its surface roughness was determined to be almost two times higher than the respective plasma-untreated polymer. It is noteworthy that plasma-modified LDPE showed no significant cytotoxicity in vitro. Thus, based on the current research results, it is concluded that a multilayer system (based on DLC coatings) obtained using plasma treatment of the LDPE surface can be proposed as a prospective solution for improving mechanical properties while maintaining biocompatibility.

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Section: Morphological Analysissupporting

confidence: 76%

Physicochemical and Biological Activity Analysis of Low-Density Polyethylene Substrate Modified by Multi-Layer Coatings Based on DLC Structures, Obtained Using RF CVD Method

et al. 2018

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“…The lower film stress of the a-SiC:H layers due to a higher Si concentration is in good agreement to data observed from RF-PECVD deposited a-SiC:H thin films [5]. On the other hand, the lower stress of thin films deposited at higher CH4 flow rate is interesting and will be further analysed, as a-C:H thin films tend to have an even higher compressive "as-deposited" residual stress [6]. The deposition rate increases rather linearly from 7.5 to 25 nm·min -1 with increasing .…”

Section: Influence Of On Stress Deposition Rate and Refractive Indexsupporting

confidence: 84%

Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin Films

Frischmuth

Schneider

Grille

et al. 2014

Procedia Engineering

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“…However, the high compressive stress, which limits the thickness of coatings, represents a main disadvantage of DLC coatings. One of the methods to reduce the stress are based on the use of different film compositions, for instance, with silicon addition [21] or multi layered architectures [22]. Recently, metal-containing hydrogenated diamond-like carbon coatings (Me-DLC) have attracted great interest since their initial appearance two decades ago [23][24][25].…”

Section: Introductionmentioning

confidence: 99%

Structure, Mechanical and Tribological Properties of Me-Doped Diamond-Like Carbon (DLC) (Me = Al, Ti, or Nb) Hydrogenated Amorphous Carbon Coatings

2018

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Metal containing hydrogenated diamond-like carbon coatings (Me-DLC, Me = Al, Ti, or Nb) of 3 ± 0.2 μm thickness were deposited by a magnetron sputtering-RFPECVD hybrid process in an Ar/H2/C2H2 mixture. The composition and structure were investigated by Energy Dispersive X-ray Spectroscopy (EDS), X-ray Diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The residual stress was measured using the curvature method and nanoindentation was used to determine the hardness and the Young’s modulus. A Ball-on-disk tribometer was employed to investigate the frictional properties and sliding wear resistance of films. The results show that the properties depend on the nature and the Me content in the coatings. The doping of the DLC coatings leads to a decrease in hardness, Young’s modulus, and residual stresses. Wear rate of the films first decreases with intermediate Me contents and then increases for higher Me contents. Significant improvements in the friction coefficient on steel as well as in the wear rate are observed for all Al-DLC coatings, and, concerning the friction coefficient, the lowest value is measured at 0.04 as compared to 0.07 for the undoped DLC.

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Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD

Cited by 47 publications

References 22 publications

Physicochemical and Biological Activity Analysis of Low-Density Polyethylene Substrate Modified by Multi-Layer Coatings Based on DLC Structures, Obtained Using RF CVD Method

Physicochemical and Biological Activity Analysis of Low-Density Polyethylene Substrate Modified by Multi-Layer Coatings Based on DLC Structures, Obtained Using RF CVD Method

Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin Films

Structure, Mechanical and Tribological Properties of Me-Doped Diamond-Like Carbon (DLC) (Me = Al, Ti, or Nb) Hydrogenated Amorphous Carbon Coatings

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