2018
DOI: 10.3390/coatings8100370
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Structure, Mechanical and Tribological Properties of Me-Doped Diamond-Like Carbon (DLC) (Me = Al, Ti, or Nb) Hydrogenated Amorphous Carbon Coatings

Abstract: Metal containing hydrogenated diamond-like carbon coatings (Me-DLC, Me = Al, Ti, or Nb) of 3 ± 0.2 μm thickness were deposited by a magnetron sputtering-RFPECVD hybrid process in an Ar/H2/C2H2 mixture. The composition and structure were investigated by Energy Dispersive X-ray Spectroscopy (EDS), X-ray Diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The residual stress was measured using the curvature method and nanoindentation was used to determine the hardness and the Young’… Show more

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Cited by 49 publications
(19 citation statements)
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“…On Kapton HN foils the elevated gauge factors as a result of crack formation were detected at Nb contents of 50-70 at %, which correlates with the increased film stress and the morphology change. Other investigations at lower Nb-contents (Me/C-ratio up to 0.2) showed stress values around −2 GPa for pure DLC-films, decreasing to values as low as −0.02 GPa with Nb embedded in the DLC accompanied with a decreasing hardness [4,5]. Compared to these values the stress in the coatings of the present study is relatively low.…”
Section: Stress and Hardness Of A-c:h:nbcontrasting
confidence: 64%
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“…On Kapton HN foils the elevated gauge factors as a result of crack formation were detected at Nb contents of 50-70 at %, which correlates with the increased film stress and the morphology change. Other investigations at lower Nb-contents (Me/C-ratio up to 0.2) showed stress values around −2 GPa for pure DLC-films, decreasing to values as low as −0.02 GPa with Nb embedded in the DLC accompanied with a decreasing hardness [4,5]. Compared to these values the stress in the coatings of the present study is relatively low.…”
Section: Stress and Hardness Of A-c:h:nbcontrasting
confidence: 64%
“…Compared to these values the stress in the coatings of the present study is relatively low. Reason for the decrease of stress with increasing metal ratio is the decreasing content of C sp 3 and relaxation of distorted bonds induced by the metal [4].…”
Section: Stress and Hardness Of A-c:h:nbmentioning
confidence: 99%
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“…This, however, does not change the fact that this area is still valid and numerous researchers continue their studies on other forms of carbon, including diamond-like carbon (DLC). DLC is excellent as a low-friction or anti-wear coating [8,9] especially in medical applications [10,11] and it is often modified by adding various elements, e.g., Si, Ag, F or Ti [12][13][14]. It can also be used for the production of carbon-based fragmented materials, which are usually described in the literature as flakes or powders [15,16].…”
Section: Introductionmentioning
confidence: 99%
“…These polymer brushes exhibit an ultra-low friction coefficient of less than 0.01 [27,28]. Diamond-like carbon (DLC) is also used as one of the effective friction materials for reducing friction between surfaces [29,30]. Lubricating properties of cyano-based ionic liquids in steel/DLC and DLC/DLC contacts have been evaluated, and these combinations have been reported to exhibit low friction [17,20,[31][32][33].…”
Section: Introductionmentioning
confidence: 99%