The energetic and structural properties of
SiH2
adsorbed on the single dimer vacancy (SDV) of the
Si(100)-c(4 × 2)
surface have been studied by using empirical tight-binding (ETB) total energy calculations. The adsorptions
of SiH2,
SiH2 with a hydrogen
adatom (SiH2+H)
and SiH2 with two
hydrogen adatoms (SiH2+2H) on the Si(100) surface with SDV structure have been studied. Three
possible sites (A, B and C) are found in each case. Adsorbing of
SiH2
or H on the SDV makes the structure of the SDV change. When a unit of
SiH2
is adsorbed on the SDV, the A site is more stable than the B site. If
SiH2+H or
SiH2+2H
is adsorbed on the SDV, the relative stability of the A site and B site reverses. The C site
is found to be the least stable site in all cases.