Structural changes in doped a-C:H films during annealing

Oral, B.; Hauert, Roland; Müller, Ulrich; Ernst, Karl‐Heinz

doi:10.1016/0925-9635(94)05283-2

Cited by 38 publications

(17 citation statements)

References 17 publications

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“…This trend is agreement with the studies of Chiu and Tallant et al. 23,[30][31][32][33][34][35][36] Figure 3 displays the I D =I G ratio as a function of annealed temperature and compared to other papers. 23,31,32,37) It can be verified that the as-deposited DLCH film contains the diamond-like property due to its I D =I G ratio (1.72) is similar to reports from Ma (1.30), Sung (1.70), Sheeja (1.76) and Zhang (1.80), which are especially characterized on hardness performance.…”

supporting

confidence: 81%

“…23,[30][31][32][33][34][35][36] Figure 3 displays the I D =I G ratio as a function of annealed temperature and compared to other papers. 23,31,32,37) It can be verified that the as-deposited DLCH film contains the diamond-like property due to its I D =I G ratio (1.72) is similar to reports from Ma (1.30), Sung (1.70), Sheeja (1.76) and Zhang (1.80), which are especially characterized on hardness performance. [38][39][40][41] The I D =I G ratio increases from 1.72 to 2.04 with increasing annealed temperature from asdeposited to 400 C with one significant variance at 300 C and this means that annealed DLCH starts to increase its disorder performance at this critical temperature, these values are consistent with the experimental result by Tallant, Oral and Tang et al [30][31][32][33][34][35][36] According to these characteristics, the annealed DLCH film has slight graphitization when heating up to 300 C, this critical temperature is in agreement with the study that thermal annealing treatment would lead to lose the hydrogen and result in the graphitization conversion for C-C sp 3 bonded carbon to transform to C-C sp 2 bonded carbon.…”

mentioning

confidence: 99%

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Correlation between ID&frasl;IG Ratio from Visible Raman Spectra and sp2/sp3 Ratio from XPS Spectra of Annealed Hydrogenated DLC Film

et al. 2006

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The hydrogened diamond like carbon film (DLCH) with 1 mm thickness is made by hydrocarbon gas ion beam deposition method. The relationship between I D =I G ratio fitted from visible Raman spectra and sp 2 /sp 3 ratio done from XPS spectra of DLCH film shows a trend. The I D =I G ratio of deconvoluted visible Raman spectra shows a correlation with sp 2 /sp 3 ratio from XPS spectra as annealing temperature increases, the graphitization and the disorder increase. The I D =I G ratios fitted with two-curve Gaussian functions of Raman spectra tend to be proportional to sp 2 /sp 3 ratio fitted with three-curve with 100% Gaussian function of XPS spectra when post annealed treatment is below 400 C and without severe oxidation.

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supporting

confidence: 81%

mentioning

confidence: 99%

Correlation between ID&frasl;IG Ratio from Visible Raman Spectra and sp2/sp3 Ratio from XPS Spectra of Annealed Hydrogenated DLC Film

et al. 2006

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“…26,27) Table 2 also implies that the DLCH is more stable and has slight graphitization when heating up to 300 C. This critical temperature is in agreement with the study that thermal annealing treatment would result in the conversion from amorphous carbon into graphite and soften the DLCH structure. [7][8][9] …”

Section: Contact Angle Testmentioning

confidence: 99%

“…The combination of PI's residual tensile stress and thermal annealing relief effect on DLCH film can partially release some DLCH's residual compressive stress. [7][8][9] Adhesion strength can be evaluated by using the crosscut tool and tape test method. The results show a white and small area, which indicates the crosscut paths for remained DLCH surface due to PI film have been scratched out.…”

Section: Residual Stressmentioning

confidence: 99%

“…However, such treatments will cause hardness significantly decreasing when annealed temperature is above certain critical transition point. [7][8][9] Other methods use the additive layer under the DLCH film, such as the interlayer structure (DLCH/Ti/substrate), multilayer structure (DLCH/TiCN/TiN/Ti/substrate) and special graded structure to improve the DLCH adhesion. 10) In addition, many studies have been reported about the property in DLCH over polymer structure.…”

Section: Introductionmentioning

confidence: 99%

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Spin-Coating Polyimide Film on Hydrogenated DLC Film Surface Prepared by Ion Beam Deposition Method

2006

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The present work describes the hybrid layers consisting of 1-mm-thick hydrogenated diamond-like carbon (DLCH) film deposited by ion beam deposition (IBD) method as the bottom layer and spin coating polyimide (PI) film at a thickness of 6 mm as the top layer. Optical microscopy shows that all DLCH film, PI film and PI/DLCH film have smooth surface and are free from cracks or wrinkles. Water contact angle measurement shows that the annealed DLCH film has the higher relative adhesive tension and adhesive work than that of PI film. Raman spectra show that the DLCH film can avoid severe graphitization & degradation at 300 C during annealing treatment, and FTIR spectra also exhibit that the PI film will reach 95% imidization during the curing step at 300 C. PI film can act on DLCH film as the stress buffer. This is demonstrate from warpage measurement showing that top PI film with tensile stress can partially reduce the compressive stress over bottom DLCH film with 6.7% warpage reduction. The electrical resistivity of PI/DLCH/Si is similar to that of PI/Si is resulted from the PI passivation effect.

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Multipeak fitting analysis of Raman spectra on DLCH film

Tai

Lee

Chen

et al. 2009

J Raman Spectroscopy

106

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The hydrogenated diamond-like carbon (DLCH) film with 1-µm thickness is deposited by direct hydrocarbon gas ion beam method on silicon wafer and annealed at 400 • C. Detailed Raman spectra feature are fitted from nine sets of different peak fitting functions, including Gaussian, Lorentzian and Breit-Wigner-Fano (BWF) functions. These fitting results obtained from a two-peak combination show some specific variances on the G peak position, FWHM G and I D /I G ratio for as-deposited and as-annealed DLCH films. The most popular two-peak fitting method with full Gaussian function tends to exhibit a higher ratio of the G peak position shift and higher I D /I G ratio than others fitting methods, the drastic difference among the most popular G (G) & G (D) and B (G) & L (D) schemes also have brought out in I D /I G ratio. However, for a more complex four-peak Gaussian function fitting Raman spectra, the I D /I G ratio is close to that of a two-peak fitting function with a mixture functions of BWF (G) and L (D). Furthermore, a series of systematic peak fitting procedures and comparisons of Raman spectra have been discussed in this study.

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Structural changes in doped a-C:H films during annealing

Cited by 38 publications

References 17 publications

Correlation between <I>I</I><SUB>D</SUB>&frasl;<I>I</I><SUB>G</SUB> Ratio from Visible Raman Spectra and sp<SUP>2</SUP>/sp<SUP>3</SUP> Ratio from XPS Spectra of Annealed Hydrogenated DLC Film

Correlation between <I>I</I><SUB>D</SUB>&frasl;<I>I</I><SUB>G</SUB> Ratio from Visible Raman Spectra and sp<SUP>2</SUP>/sp<SUP>3</SUP> Ratio from XPS Spectra of Annealed Hydrogenated DLC Film

Spin-Coating Polyimide Film on Hydrogenated DLC Film Surface Prepared by Ion Beam Deposition Method

Multipeak fitting analysis of Raman spectra on DLCH film

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