Structural characteristics of diamond-like nanocomposite films grown by PECVD

Yang, Won Jae; Choa, Yong Ho; Sekino, Tohru; Shim, Kwang Bo; Niihara, Koichi; Auh, Keun Ho

doi:10.1016/s0167-577x(03)00053-3

Cited by 31 publications

(21 citation statements)

References 18 publications

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“…While D band attributed well localized sp 2 bonded cluster as a breathing mode of hexagonal ring form graphitic structure within DLN network. 9,[29][30][31][32][33][34] For any carbon based material, the sp 3 fraction is important parameter to investigate the mechanical properties of the films. The peak position and width of D and G bands and the intensity ratio of D and G peaks are well known characterization for hydrogenated and poor hydrogen free DLC based films.…”

Section: B Structural Propertiesmentioning

confidence: 99%

“…DLN film consists of diamondlike carbon bonds chemically stabilized by hydrogen atoms and quartz-like silicon bonds chemically stabilized by oxygen atoms in a pure amorphous structure. [8][9][10] This films can be deposited by different techniques like plasma enhanced chemical vapor deposition, [9][10][11][12] plasma assisted chemical vapor deposition, 13,14 thermally activated chemical vapor deposition 15 etc. To achieve better film properties, researchers need to investigate the details parameters like precursor flow rate, chamber pressure, substrate temperature, which are very important for good quality microstructure of the films.…”

Section: Introductionmentioning

confidence: 99%

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Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

et al. 2012

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Diamond-like nanocomposite (DLN) thin films were deposited on pyrex glass substrate using different flow rate of haxamethyldisiloxane (HMDSO) based liquid precursor with nitrogen gas as a glow discharged decomposition by plasma enhanced chemical vapor deposition (PECVD) technique. The significant influence of different precursor flow rates on refractive index and thickness of the DLN films was measured by using spectroscopic filmatrics and DEKTAK profilometer. Optical transparency of the DLN thin films was analyzed by UV-VIS-NIR spectrometer. FTIR spectroscopy, provides the information about shifted bonds like SiC2, Si-C, Si-O, C-C, Si-H, C-H, N-H, and O-H with different precursor flow rate. We have estimated the hardness of the DLN films from Raman spectroscopy using Gaussian deconvolution method and tried to investigate the correlation between hardness, refractive index and thickness of the films with different precursor flow rates. The composition and surface morphology of the DLN films were investigated by X-ray photo electron spectroscopy (XPS) and atomic force microscopy (AFM) respectively. We have analyzed the hardness by intensity ratio (ID/IG) of D and G peaks and correlates with hardness measurement by nanoindentation test where hardness increases from 27.8 μl/min to 80.6μl/min and then decreases with increase of flow rate from 80.6μl/min to 149.5μl/min. Finally, we correlates different parameters of structural, optical and tribological properties like film-thickness, refractive index, light transmission, hardness, surface roughness, modulus of elasticity, contact angle etc. with different precursor flow rates of DLN films

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Section: B Structural Propertiesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

et al. 2012

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“…The multiGaussian curve fitting method is generally used to analyze the spectra of diamond-like carbon (DLC) generated by such methods as: near-edge X-ray absorption fine structure (NEXAFS), 1) infrared (IR) absorption, 2,3) X-ray photoelectron spectroscopy (XPS), [4][5][6] and visible Raman spectroscopy. 3,4,[6][7][8][9][10][11][12][13][14][15][16][17] Visible Raman spectroscopy is applied to the structural characterization of DLC films as a speedy and less destructive technique. A two-Gaussian curve fitting method 3,4,[6][7][8][9][10][11][12] is usually applied to the visible Raman spectra of these films, to define the D (disordered) and G (graphite) peaks, located at approximately 1350 cm À1 and 1580 cm À1 respectively.…”

Section: Introductionmentioning

confidence: 99%

“…3,4,[6][7][8][9][10][11][12][13][14][15][16][17] Visible Raman spectroscopy is applied to the structural characterization of DLC films as a speedy and less destructive technique. A two-Gaussian curve fitting method 3,4,[6][7][8][9][10][11][12] is usually applied to the visible Raman spectra of these films, to define the D (disordered) and G (graphite) peaks, located at approximately 1350 cm À1 and 1580 cm À1 respectively. 8) Some researchers also use three [13][14][15][16] or more Gaussian curves, 17) to fit the visible Raman spectra of DLC and obtain the I D =I G ratios.…”

Section: Introductionmentioning

confidence: 99%

“…A two-Gaussian curve fitting method 3,4,[6][7][8][9][10][11][12] is usually applied to the visible Raman spectra of these films, to define the D (disordered) and G (graphite) peaks, located at approximately 1350 cm À1 and 1580 cm À1 respectively. 8) Some researchers also use three [13][14][15][16] or more Gaussian curves, 17) to fit the visible Raman spectra of DLC and obtain the I D =I G ratios. However, some contradictory conclusions have been drawn for amorphous carbon (or diamond-like) films analyzed by applying multi-Gaussian curve fitting methods to Raman spectra.…”

Section: Introductionmentioning

confidence: 99%

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Comparative Analysis of Trends Resulting from the Use of a Multi-Gaussian Curve Fitting Method Applied to the Visible Raman Spectra of Sputtered Amorphous Carbon

Shen

Chou

2011

Mater. Trans.

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This paper discusses the application of a direct integral area method and a multi-Gaussian curve fitting method to the interpretation of visible Raman spectra. A data analysis study was performed on three amorphous carbon films prepared by magnetron sputtering. Application of XPS, AES and the direct integration of the areas under the curves generated by visible Raman spectra, gave results that represented the diamondlike qualities of three amorphous carbon films in a similar manner, but the representation of data-trends using the multi-Gaussian curve fitting method was irregular. More specifically, we discovered that both the number of Gaussian curves applied, and the analytic regions chosen for analyzing the spectra affected the interpretation of the data obtained; our results indicate that the multi-Gaussian curve fitting method may give rise to inconsistent results when applied to the analysis of the visible Raman spectra of diamond-like (amorphous) carbon films.

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Effect of annealing on structural and optical properties of diamond-like nanocomposite thin films

Jana

Das

De³

et al. 2013

Appl. Phys. A

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Structural characteristics of diamond-like nanocomposite films grown by PECVD

Cited by 31 publications

References 18 publications

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD

Comparative Analysis of Trends Resulting from the Use of a Multi-Gaussian Curve Fitting Method Applied to the Visible Raman Spectra of Sputtered Amorphous Carbon

Effect of annealing on structural and optical properties of diamond-like nanocomposite thin films

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