Structural characterization of multilayered sputtered TiN/ZrN coatings

Tavares, C. J.; Rebouta, L.; Almeida, Bernardo Pinto de; Sousa, J. B.

doi:10.1016/s0257-8972(97)00589-6

Cited by 25 publications

(13 citation statements)

References 16 publications

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“…Error bars are given for the sake of clarity. The bilayer period was determined from structural re®nement of the XRD high angle patterns of the same ®lms [19]. Table 2 presents a summary of all of the experimental data extracted for a series of samples regarding the critical loads detected for the ®rst failure (L c1 ) and the total adhesion failure (L c2 ).…”

Section: Hardness and Young's Modulusmentioning

confidence: 99%

“…3 represents an example of a scratch test performed on the sample M10, grown by static mode. Visible are the plots of the AE signal, the transversal frictional force and Table 2 Critical load values obtained for the first failure (L c1 ) and total failure (L c2 ) corresponding to TiN/ZrN multi-layers, when subjected to a scratch test The modulation period (Á) is also shown [19]. An average number of 6 tests was performed on each sample.…”

Section: Hardness and Young's Modulusmentioning

confidence: 99%

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Mechanical characterisation of TiN/ZrN multi-layered coatings

Tavares

Rebouta

Andritschky

et al. 1999

Journal of Materials Processing Technology

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Ultra-microhardness, adhesion and residual-stress analysis tests were performed on reactive sputtered deposited TiN/ZrN multi-layers. Hardness values as high as $3600 Vickers were achieved for this material. Scratch tests of coatings deposited on steel substrates con®rmed the existence of different mechanisms associated with total adhesion failure, depending essentially on multi-layer deposition control parameters. Stress-relaxation measurements indicated the compressive nature of these thin ®lms. The inherent mechanical characterisation was broadened regarding the induced contributions from ®lm thickness, total interfacial roughness, number of bi-layers and corresponding modulation periodicity. Complementary analyses with data extracted from structural XRD studies have been undertaken. # 1999 Elsevier Science S.A. All rights reserved.

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Section: Hardness and Young's Modulusmentioning

confidence: 99%

Section: Hardness and Young's Modulusmentioning

confidence: 99%

Mechanical characterisation of TiN/ZrN multi-layered coatings

Tavares

Rebouta

Andritschky

et al. 1999

Journal of Materials Processing Technology

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“…Therefore, the scattering solely arises from the chemical modulation of the structure. The modulation period can be experimentally assessed through the position of the low-angle Bragg di!raction peaks [10,11]:…”

Section: Methodsmentioning

confidence: 99%

Mechanical and surface analysis of Ti0.4Al0.6N/Mo multilayers

Tavares

Rebouta

Andritschky

et al. 2001

Vacuum

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The quest for hard materials that are able to sustain elevated stresses as tools or cutting processes has led to the investigation of (Ti,Al)N/Mo multilayer coatings. These structures have been deposited by dc magnetron sputtering on high-speed steel and stainless-steel substrates and designed with modulation periods of approximately 13 nm, up to a total thickness of 2.8 m. Experimental X-ray di!raction (XRD) achieved the basics involving structural quality and texture while RBS provided the composition. From AFM observations the waviness of the surface was monitored and it was found that the rms roughness values were minimised for a bias voltage of !120 V. Ultramicrohardness values of 33 GPa were obtained for the best samples, and their adhesion to the steel substrates was also studied. Residual stress measurements revealed a compressive stress state that prevailed in these structures, ranging from !0.2 to !1.3 GPa.

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“…Vacuum-arc evaporation of cathode is a promising deposition method, which allows fabrication of multilayered coatings on the base of nitrides and carbides of transition metals [5][6][7][8]. A varying the deposition conditions, such as gas pressure in the deposition chamber, bias potential, bilayer thickness, etc.…”

Section: Introductionmentioning

confidence: 99%

Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: Structure, properties, first-principles calculations

Pogrebnjak

Иващенко

Бондар

et al. 2017

Materials Characterization

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A B S T R A C TNanoscale multilayered TiN/ZrN films were deposited using sequential vacuum-arc deposition of Ti and Zr targets in a nitrogen atmosphere. Studies of film's properties were carried out using various modern methods of analysis, such as XRD, STEM, HRTEM, SIMS combined with results of nanoindentation and tribological tests. To interpret the mechanical properties of the deposited multilayer films first-principles calculations of TiN(111), ZrN(111) structures and TiN(111)/ZrN(111) multilayer were carried out. To study the influence of thermal annealing, several samples were annealed in air at the temperature 700°C. All deposited samples were highly polycrystalline with quite large 20-25 nm crystals. The crystalline planes were very ordinated and demonstrated an excellent coordinated growth. The nanohardness and elastic modulus of non-annealed coatings reached 42 GPa and 348 GPa, respectively. Annealing in air at the temperature 700°C led to partial oxidation of the multilayered coatings, however hardness of the non-oxidized part of the coatings remained as high, as for initial coatings. All deposited coatings demonstrate good wear resistance.

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Structural characterization of multilayered sputtered TiN/ZrN coatings

Cited by 25 publications

References 16 publications

Mechanical characterisation of TiN/ZrN multi-layered coatings

Mechanical characterisation of TiN/ZrN multi-layered coatings

Mechanical and surface analysis of Ti0.4Al0.6N/Mo multilayers

Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: Structure, properties, first-principles calculations

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